硅纳米线肖特基势垒场效应晶体管中铁电开关的结调谐

V. Sessi, H. Mulaosmanovic, R. Hentschel, S. Pregl, T. Mikolajick, W. Weber
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引用次数: 5

摘要

本文报道了一种集成铁电栅氧化物的新型硅纳米线场效应晶体管。该概念允许通过切换靠近源肖特基结的铁电层中的极化,以非易失性方式调节载流子输运。我们从调整电荷载流子的肖特基结的透射率的角度来解释结果。实验结果为将逻辑存储器概念与可重构纳米线晶体管集成提供了第一步。
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Junction Tuning by Ferroelectric Switching in Silicon Nanowire Schottky-Barrier Field Effect Transistors
We report on a novel silicon nanowire-based field effect transistor with integrated ferroelectric gate oxide. The concept allows tuning the carrier transport in a non-volatile approach by switching the polarization in the ferroelectric layer close to the source Schottky-junction. We interpret the results in terms of tuning the transmissibility of the Schottky-junction for charge carriers. The experimental results provide a first step towards the integration of memory-in-logic concepts with reconfigurable nanowire transistors.
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