{"title":"聚合物层SAW气体传感器的有限元模拟","authors":"C. Bostan, B. Șerban, V. Avramescu, I. Georgescu","doi":"10.1109/SMICND.2010.5650470","DOIUrl":null,"url":null,"abstract":"This paper presents a finite element (FE) model for SAW gas sensors with polymer layers, taking into account not only the mass loading effect, but also the viscoelastic properties of polymer layers, including loss. The FE model considers both variations of layer density and thickness with absorbed gas concentration. The damped eigenvalue analysis allows the calculation of complex propagation constants. This is an improvement over previously published FE works in this field, e.g. [1], which considered only the frequency shift and neglected the attenuation.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Simulation of SAW gas sensors with polymer layers using the finite element method\",\"authors\":\"C. Bostan, B. Șerban, V. Avramescu, I. Georgescu\",\"doi\":\"10.1109/SMICND.2010.5650470\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a finite element (FE) model for SAW gas sensors with polymer layers, taking into account not only the mass loading effect, but also the viscoelastic properties of polymer layers, including loss. The FE model considers both variations of layer density and thickness with absorbed gas concentration. The damped eigenvalue analysis allows the calculation of complex propagation constants. This is an improvement over previously published FE works in this field, e.g. [1], which considered only the frequency shift and neglected the attenuation.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5650470\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650470","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Simulation of SAW gas sensors with polymer layers using the finite element method
This paper presents a finite element (FE) model for SAW gas sensors with polymer layers, taking into account not only the mass loading effect, but also the viscoelastic properties of polymer layers, including loss. The FE model considers both variations of layer density and thickness with absorbed gas concentration. The damped eigenvalue analysis allows the calculation of complex propagation constants. This is an improvement over previously published FE works in this field, e.g. [1], which considered only the frequency shift and neglected the attenuation.
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