三维光子线键合连接氮化硅波导的热光学特性

A. Prokhodtsov, V. Kovalyuk, P. An, D. Chubich, D. Merkushev, D. Kolymagin, R. Ozhegov, G. Chulkova, A. Vitukhnovsky, G. Goltsman
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引用次数: 0

摘要

研究了连接平面氮化硅波导的错位聚合物线键(PWB)的热光学效应。为了表征制备的器件,我们通过改变芯片温度在30°C到80°C的范围内测量了通过PWBs的光传输。我们使用了一个实验装置,其中包括1510-1620 nm范围内的可调谐激光源和可变温度阶段。通过逐渐改变样品的温度,我们通过参考臂和带PWB的臂来测量传输参数。我们发现,随着共振波长的变化,TO系数分别为837 pm/°C。研究结果可用于设计芯片内部和芯片之间的复杂光互连,并展示这种互连的热稳定性。
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Thermo Optical Properties of 3D Photonic Wire Bonding Connecting Silicon Nitride Waveguides
This paper investigates the thermo-optical (TO) effect of misaligned polymer wire bonds (PWB) connecting planar silicon nitride waveguides. To characterize the fabricated devices, we measured the optical transmission through PWBs by changing the chip temperature in the range from 30°C to 80°C. We used an experimental setup, which included a tunable laser source in the 1510-1620 nm range and a changeable temperature stage. By gradually changing the temperature of the sample, we measured the transmission parameter through the reference arm and the arm with PWB. We found that the TO coefficient equals 837 pm/°C, respectively, with the change resonance wavelength. The results can be used to design complex optical interconnections inside and between chip and show the thermal stability of such interconnection.
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