{"title":"集成电路封装过程中残余应力演化的数值预测","authors":"A. R. Rezaie Adliv, K. Jansen, L. Ernst","doi":"10.1109/EUROSIME.2015.7103131","DOIUrl":null,"url":null,"abstract":"This paper comprises a numerical constitutive model for evaluating residual stresses generated during encapsulation of integrated circuits. Residual stress is a consequence of molding process which can be divided in cure and thermal induced parts. Cure originated stress had been mostly neglected in literature and a special attention had always been given to detection of thermal induced stresses. In this study, both encapsulation resulted stresses are studied independently and a numerical methodology has been developed based on the applied boundary conditions during each stage of molding and the established process dependent mechanical models. A two dimensional numerical model is implemented in a commercially available software package. The numerically predicted stress results are experimentally validated by implementing a piezoresistive stress measuring chip in a transfer molding process.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"61 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Numerical prediction of residual stresses evolving during packaging of ICs\",\"authors\":\"A. R. Rezaie Adliv, K. Jansen, L. Ernst\",\"doi\":\"10.1109/EUROSIME.2015.7103131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper comprises a numerical constitutive model for evaluating residual stresses generated during encapsulation of integrated circuits. Residual stress is a consequence of molding process which can be divided in cure and thermal induced parts. Cure originated stress had been mostly neglected in literature and a special attention had always been given to detection of thermal induced stresses. In this study, both encapsulation resulted stresses are studied independently and a numerical methodology has been developed based on the applied boundary conditions during each stage of molding and the established process dependent mechanical models. A two dimensional numerical model is implemented in a commercially available software package. The numerically predicted stress results are experimentally validated by implementing a piezoresistive stress measuring chip in a transfer molding process.\",\"PeriodicalId\":250897,\"journal\":{\"name\":\"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"volume\":\"61 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-04-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EUROSIME.2015.7103131\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUROSIME.2015.7103131","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Numerical prediction of residual stresses evolving during packaging of ICs
This paper comprises a numerical constitutive model for evaluating residual stresses generated during encapsulation of integrated circuits. Residual stress is a consequence of molding process which can be divided in cure and thermal induced parts. Cure originated stress had been mostly neglected in literature and a special attention had always been given to detection of thermal induced stresses. In this study, both encapsulation resulted stresses are studied independently and a numerical methodology has been developed based on the applied boundary conditions during each stage of molding and the established process dependent mechanical models. A two dimensional numerical model is implemented in a commercially available software package. The numerically predicted stress results are experimentally validated by implementing a piezoresistive stress measuring chip in a transfer molding process.