激光诱导石墨烯传感器在任何衬底上的直接转移过程

L. Neumaier, Lukas Rauter, S. Lengger, S. Khan, J. Kosel
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引用次数: 0

摘要

在这项工作中,我们展示了一种通用的方法,通过直接转移过程在几乎任何类型的衬底上创建激光诱导石墨烯传感器。该工艺是基于用一层聚酰亚胺密封树脂对基材进行预处理,然后用激光将传感器结构刻划到基材上。通过调整树脂厚度和激光参数,树脂被完全去除,由此产生的LIG被牢固地嵌入基板的顶部。测量结果表明,测量因子为0.51%。
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A direct transfer process for laser-induced graphene sensors on any substrate
Within this work we demonstrate a versatile approach for the creation of laser-induced graphene sensors by a direct transfer process onto virtually any kind of substrate. The process is based on preconditioning the substrate with a layer of polyimide sealing resin and subsequently laser scribing the sensor structure onto it. By tuning the resin thickness and laser parameters, the resin is entirely removed and the resulting LIG is firmly embedded on top of the substrate. The measurement results show a gauge factor of 0.51 %.
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