{"title":"大口径光束微加工二维透镜扫描仪","authors":"Hyeon-cheol Park, Cheol Song, K. Jeong","doi":"10.1109/OMEMS.2010.5672168","DOIUrl":null,"url":null,"abstract":"This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micromachined two dimensional lens scanner with large aperture beam\",\"authors\":\"Hyeon-cheol Park, Cheol Song, K. Jeong\",\"doi\":\"10.1109/OMEMS.2010.5672168\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.\",\"PeriodicalId\":421895,\"journal\":{\"name\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2010.5672168\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672168","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Micromachined two dimensional lens scanner with large aperture beam
This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and y-scanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.
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