MI007:电压电射频MEMS开关

2008 17th IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2008-12-02 DOI:10.1109/ISAF.2008.4693747

O. Wunnicke, M. Klee, K. Reimann, C. Renders, H. van Esch, W. Keur, J. Zhao, M. de Wild, A. Roest

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引用次数: 0

摘要

介绍了电压电式射频MEMS开关。这些开关经过了完全的加工，并具有机械和电气特性。讨论了机械变形和开关时间。开关的关闭可以在不到10秒的时间内完成。电气测量产生的接触电阻约为50°c，隔离电阻大于1°c。

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MI007: Galvanic piezoelectric RF MEMS switches

Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ¿s. Electrical measurements yield contact resistances in the order of 50 ¿ and isolation resistance of more than 1 G¿.

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2008 17th IEEE International Symposium on the Applications of Ferroelectrics

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