氮化镓三栅hemt的设计

M. Alsharef, R. Granzner, E. Ture, R. Quay, J. Racko, J. Breza, F. Schwierz
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引用次数: 1

摘要

通过数值模拟研究了氮化镓三栅极hemt的工作原理。结果表明,这种结构的阈值电压强烈依赖于AlGaN/GaN体的宽度,而对体高度的依赖程度较小。随着浇口长度的减小,阀体高度变得更加重要。然而,侧栅极的有益影响在体高约100 nm时达到饱和,与栅极长度无关。
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Design of GaN tri-gate HEMTs
The operation of GaN tri-gate HEMTs is investigated by numerical device simulations. It is shown that the threshold voltage of such structures strongly depends on the width of the AlGaN/GaN body and to a lesser extent on the body height. The body height becomes more important as the gate length is reduced. However, the beneficial effect of the side gates saturates at body heights around 100 nm, independent of the gate length.
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