大功率器件模块晶圆级成型工艺的优化

L. Bu, S. Ho, Dexter Velez Sorono, Daniel Rhee Min Woo
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摘要

高功率模块是未来汽车、航空航天、绿色和可再生能源行业不可或缺的。然而,随着权力的上升,许多问题也随之产生。需要更多的元件来提高可靠性、散热等。因此,整个包比普通包更复杂。包括铜夹在内的复杂结构使得成型过程相当困难。孔洞更容易被困在铜夹覆盖的芯片下的衬垫之间。在我们的模拟中,我们试图通过改变点胶模式,封装布局和晶圆上成型化合物的初始直径来实现无空洞成型。结果表明:在测量空隙覆盖率和不完全填充率时,圆形点药模式优于直线点药模式;然而,晶圆最外层的四个封装仍然包含较高的空隙覆盖率。因此,极高空隙覆盖率的封装最终会从晶圆片上移除。对初始点胶模式直径的参数化研究表明,粒径越小,孔隙问题越小。为了实现无空隙成型工艺,进行了一系列的仿真。
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Optimization of the wafer level molding process for high power device module
High power modules are indispensible in our future automotive, aerospace and green & renewable energy industry. However, a lot of issues rise along with the power rising. More components are needed to increase the reliability, dissipate heat and etc. Thus, the whole packages are more complicated than the normal ones. Complicated structure including copper clips makes the molding process rather difficult. Voids are more easily to be trapped in between the pads under the chip covered by the copper clip. In our simulation, we are trying to achieve void free molding by varying the dispensing pattern, the package layout and initial diameter of molding compound on the wafer. The results show that round dispensing pattern dominates straight line dispensing pattern in the measurement of voids coverage as well as the incomplete fill. However, the four packages on the outmost of the wafer still contain high coverage of voids ratio. Therefore, the extremely high voids coverage packages are removed eventually from the wafer. In the parametric studies of diameter of the initial dispensing pattern shows that smaller diameter results in lower voids issue. A series of simulation are carried out to achieve a void free molding process.
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