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2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)最新文献

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Influence of the height of Carbon Nanotubes on hot switching of Au/Cr-Au/MWCNT contact pairs 碳纳米管高度对Au/Cr-Au/MWCNT接触对热交换的影响
Pub Date : 2014-12-03 DOI: 10.1109/EPTC.2014.7028340
H. Liu, A. Lewis, S. H. Pu, L. Jiang, J. McBride
Gold coated Multi-Walled Carbon Nanotube (MWCNT) composites have been used for electrical contact surfaces in previous studies. It was shown that the composite could significantly improve switch lifetime, and exhibited potential as a useful contact material for MEMS switches. The reason is attributed to the contribution of the compressibility of the MWCNT forest, which creates a compliant layer under the gold films. In this study, experiments were performed for samples with different heights of MWCNT forests, namely 30 μm, 50 μm and 80 μm. The influence of MWCNT height on the switching behavior and lifetime were studied. An outcome of the work was that the sample with 80 μm height forests showed the longest lifetime, however the composites with 30 μm and 50 μm forest heights showed lower contact resistances, a parameter of high importance for MEMS switch applications.
在以往的研究中,多壁碳纳米管(MWCNT)复合材料被用于电接触面。结果表明,该复合材料可显著提高开关寿命,具有作为MEMS开关触点材料的潜力。原因是由于MWCNT森林的可压缩性,它在金膜下形成了一层柔顺层。本研究分别对30 μm、50 μm和80 μm的MWCNT森林高度进行了实验。研究了纳米碳管高度对开关性能和寿命的影响。研究结果表明,森林高度为80 μm的样品寿命最长,而森林高度为30 μm和50 μm的复合材料具有较低的接触电阻,这是MEMS开关应用中非常重要的参数。
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引用次数: 2
Towards adequate qualification testing of electronic products: Review and extension 迈向电子产品充分的合格测试:审查和扩展
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028353
G. Khatibi, B. Czerny, J. Magnien, M. Lederer, E. Suhir, J. Nicolics
Electronic product manufacturers are constantly seeking efficient, cost-effective and trustworthy accelerated test (AT) methods to keep up with the today's market demands. At present, accelerated temperature cycling testing is viewed as the state of the art for reliability assessment of electronic products. Accelerated mechanical fatigue testing has been proposed recently as a novel concept and an attractive cost-effective and time-saving qualification alternative for electronic devices. The principle idea of this approach is replacement of thermally induced loading with equivalent and adequate mechanical loading. Using mechanical fatigue testing set-ups, the devices under test can be subjected to single or multi-axial cyclic loading conditions at high frequencies. As a result, physically meaningful lifetime curves can be obtained. The suggested methodologies and procedures enable one to detect the vulnerable sites of the devices in a very short time. Exemplary results for power semiconductor products demonstrate the applicability of the proposed method for qualification of first and second level interconnects. The advantages and limitations of the proposed concept are addressed and discussed in detail.
电子产品制造商不断寻求高效、经济、可靠的加速测试(AT)方法,以跟上当今市场的需求。目前,加速温度循环测试被认为是电子产品可靠性评估的最新技术。近年来,加速机械疲劳测试作为一种新颖的概念被提出,是一种具有吸引力的、具有成本效益和节省时间的电子设备鉴定替代方案。这种方法的主要思想是用等效和适当的机械载荷代替热诱导载荷。使用机械疲劳测试装置,被测设备可以承受高频单轴或多轴循环加载条件。因此,可以获得物理上有意义的寿命曲线。建议的方法和程序使人们能够在很短的时间内检测到设备的易受攻击的地点。功率半导体产品的示例性结果表明所提出的方法适用于一级和二级互连的鉴定。对所提出的概念的优点和局限性进行了详细的讨论。
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引用次数: 6
Structure reliability and characterization for FC package w/Embedded Trace coreless Substrate 嵌入式无芯基板FC封装的结构可靠性和特性分析
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028314
E. Chen, Albert Lan, Jack You, M. Liao
In recent years mobile devices are getting more and more involved in to our daily life. With the requirement of IC packages inside mobile devices toward smaller form factor, low cost with high performance, a coreless substrate technology, naming Embedded Trace Substrate (ETS) is developed to meet market requirement and it has been studied in this paper. For an IC package with coreless substrate, warpage performance is a concern comparing to non-coreless substrate package of which has better substrate strength to balance Coefficients of Thermal Expansion (CTE) mismatch from molding compound. A Flip Chip Chip Scale Package (FCCSP) with body size 12×12mm is used as a test vehicle for this study and molding underfill (MUF) structure is selected to reduce package cost of additional underfill material. To evaluate the warpage performance of the ETS coreless substrate, finite element analysis simulation tool is used to compare package warpage for room temperature and high temperature. Also experimental validation of warpage is done by Shadow Moire test equipment. The study matrix includes different molding compound materials, molding compound thicknesses, substrate designs, substrate thicknesses, die thicknesses. By simulation and Shadow Moire measurement results can help the package structure and molding compound material selection that with thicker molding compound thickness, die thickness and substrate thickness have better warpage performance. In addition to warpage, the reliability performance is also evaluated for package under different test conditions such as assembly out time zero, uHAST, TCT and HTST. The evaluation index is Open/Short yield and failure analysis is also done for the O/S failed samples to evaluate failure rate, failure mode and failure locations. In the end, a package structure and bill of material (BOM) selection is finalized to have suitable warpage performance that meets requirement and can also pass reliability criteria.
近年来,移动设备越来越多地参与到我们的日常生活中。随着移动设备内部集成电路封装对小型化、低成本和高性能的要求,一种无芯基板技术应运而生,并对其进行了研究。对于无芯基板集成电路封装来说,与无芯基板封装相比,翘曲性能是一个值得关注的问题,无芯基板封装具有更好的基板强度,以平衡热膨胀系数(CTE)与成型化合物的不匹配。本研究使用体尺寸为12×12mm的倒装芯片规模封装(FCCSP)作为测试载体,并选择模塑底填料(MUF)结构以降低额外底填料的封装成本。为了评估ETS无芯基板的翘曲性能,使用有限元分析仿真工具对室温和高温下的封装翘曲进行了比较。并利用阴影云纹试验装置对翘曲进行了实验验证。研究基体包括不同的成型复合材料、成型复合厚度、基板设计、基板厚度、模具厚度。通过仿真和影云纹测量结果可以帮助封装结构和成型复合材料的选择,更厚的成型复合材料厚度、模具厚度和衬底厚度具有更好的翘曲性能。除了翘曲外,还对封装在不同测试条件下的可靠性性能进行了评估,如装配出厂时间为零、uHAST、TCT和HTST。评价指标为Open/Short良率,并对O/S失效样品进行失效分析,评估故障率、失效模式和失效位置。最后确定包装结构和物料清单(BOM)的选择,使其具有合适的翘曲性能,既满足要求,又能通过可靠性标准。
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引用次数: 5
Unit warpage control with universal die thickness 采用通用模具厚度控制单元翘曲
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028392
Gu Bin, Jun Dimaano, Richen Chen, E. Bool, S. F. Shi, Choon Ghee Ang, N. Suthiwongsunthorn
The package warpage induced by residual stresses during molding process is one of the major thermo-mechanical reliability concerns in IC packaging. This paper proposes a method to find solution to unit warpage control with universal die thickness that ranges from 40 um to 250 um for the large FPBGA package. Firstly, the effect of each factor (mold cap thickness, substrate thickness, mold compound and die attach material) on warpage with these various die thickness was simulated and discussed. Then both tests and FEM simulations were conducted for few legs. The FEM simulation results were correlated with actual tests to determine the crying and smiling warpage boundary for satisfying warpage requirement in simulation. Based on actual tests and simulation results, three mold compounds (high CTE, middle CTE, low CTE), three mold cap thickness and two substrate thickness were selected to make full DoE simulation. Final simulation results showed that several combinations of mold cap thickness, substrate thickness and mold compound could be the solution to the warpage requirements with universal die thickness. Only a few more actual tests are needed to verify the final solution based on the simulation results.
成型过程中由残余应力引起的封装翘曲是集成电路封装中主要的热机械可靠性问题之一。本文提出了一种求解大型FPBGA封装中通用模具厚度在40 ~ 250 um范围内的单元翘曲控制的方法。首先,模拟和讨论了各因素(模盖厚度、基材厚度、模具复合材料和模具附着材料)在不同模具厚度下对翘曲的影响。然后对部分支腿进行了试验和有限元模拟。将有限元模拟结果与实际试验结果相结合,确定了满足模拟翘曲要求的哭泣和微笑翘曲边界。在实际试验和仿真结果的基础上,选择3种模具化合物(高CTE、中CTE、低CTE)、3种模盖厚度和2种基材厚度进行了全DoE仿真。最后的仿真结果表明,模盖厚度、基材厚度和模具复合材料的几种组合可以解决通用模具厚度的翘曲要求。只需再进行一些实际测试,即可验证基于仿真结果的最终解决方案。
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引用次数: 6
Optimization studies of lift-off methods and its application in electrochemical biosensors 提升方法的优化研究及其在电化学生物传感器中的应用
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028298
Leong Yew Wing, Zhang Shiyun, Christopher Pang, Mohammad Hazren, Sunil Kumar, W. C. Chung
Increasing demand for faster and more accurate diagnostic procedures has sparked trends in the development of electrochemical sensors for biology research and medical diagnostics. Inter-digitated electrode based electrochemical sensors have shown higher sensitivity and label-free approach to medical diagnostics. This paper presents a comparative study on the different lift-off methods which were used in the fabrication of high density gold inter-digitated electrodes (IDE) for electrochemical detection. The paper focuses on the generation of “T-Topped” resist profile also known as re-entrance resist profile which facilitates efficient metal lift-off after deposition. IDE with thickness of 30nm Ti and 200nm gold electrodes with 5μm line width and a pitch of 15μm were patterned on an 8” silicon substrate insulated with thermal oxide film. The detailed fabrication processes, the adhesion enhancement strategies, and accounts for the merits and limitation of each proposed fabrication technique are presented. Lastly, the impact of different expose dose on the final critical dimension (CD) of the electrochemical sensors was investigated.
对更快和更准确的诊断程序的日益增长的需求引发了用于生物学研究和医学诊断的电化学传感器的发展趋势。基于互指电极的电化学传感器在医学诊断中显示出更高的灵敏度和无标签的方法。本文比较研究了用于电化学检测的高密度金互指电极(IDE)的不同提离方法。本文重点研究了“t顶”型抗蚀剂的生成,这种抗蚀剂也称为再入型抗蚀剂,可促进沉积后金属的高效剥离。将厚度为30nm Ti和间距为15μm、线宽为5μm的200nm金电极的IDE设计在8”硅衬底上,衬底采用热氧化膜绝缘。介绍了详细的制造工艺、增强附着力的策略以及每种制造技术的优点和局限性。最后研究了不同暴露剂量对电化学传感器最终临界尺寸(CD)的影响。
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引用次数: 1
Performance of electrically conductive adhesive attached sensors in high temperature cycling 导电胶粘接传感器在高温循环中的性能
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028358
S. Lahokallio, L. Frisk
This paper studies the high temperature performance and reliability of electrically conductive adhesive (ECA) attached temperature sensors. Testing of the sensors was conducted using a high temperature cycling test with long transition time between the extreme temperatures of -55°C and +180°C. Several different ECA materials were used as attachment materials. Additionally, the effects of the thickness and material of a substrate were studied. Real-time measurements were conducted during testing and these showed that ECA interconnections could withstand harsh high temperature cycling for long periods of time when proper materials and structures were chosen. Significant differences between the ECA materials were seen, thus the selection of the ECA material was found to be very important for the interconnection reliability. Additionally, the thickness and material of the substrate had a marked effect on the reliability. In most cases a flexible substrate yielded a better performance, but the effect differed between the ECA materials. The ECAs studied were mostly anisotropic conductive adhesives (ACAs). However, two isotropically conductive adhesives (ICAs) were also studied, one of them also with an underfill. Although underfill material is commonly used with ICAs, in this study it was observed to impair the reliability. The results showed that analysis of the reliability of all materials and structures is essential when adhesives are used in high temperature applications.
本文对导电胶(ECA)温度传感器的高温性能和可靠性进行了研究。传感器的测试采用高温循环测试,在-55°C和+180°C的极端温度之间有很长的过渡时间。采用几种不同的ECA材料作为附件材料。此外,还研究了衬底厚度和材料的影响。在测试过程中进行了实时测量,结果表明,如果选择了合适的材料和结构,ECA互连可以承受长时间的高温循环。ECA材料之间存在显著差异,因此发现ECA材料的选择对互连可靠性非常重要。此外,衬底的厚度和材料对可靠性有显著影响。在大多数情况下,柔性衬底产生了更好的性能,但ECA材料之间的效果有所不同。研究的ECAs多为各向异性导电胶粘剂(ACAs)。然而,也研究了两种各向同性导电胶粘剂(ICAs),其中一种也有下填料。虽然下填料通常用于ICAs,但在本研究中观察到它会损害可靠性。结果表明,当粘合剂用于高温应用时,对所有材料和结构的可靠性进行分析是必不可少的。
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引用次数: 2
Electrical performance characterization for novel multiple compartments shielding and verification on LTE modem SiP LTE调制解调器SiP上新型多隔室屏蔽的电气性能表征及验证
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028321
A. Lin, Vincent Chen, J. Chen, Simon Leou, Thomas Wang, Harrison Chang
This paper describes the performance characterization for a novel compartment shielding process. The CPS process is developed for molded base SiP module which can form multiple arbitrary shape shielded areas. This compartment shielding structure not only occupies the smallest space itself, the good shielding performance can reduce the leakage and increase more placement area by shortening the keep out distance at the sides and edges near the wall between compartments. It reduces the interference between shielded sub-circuits e.g. digital, analog and RF circuits. The compartment shielding structure is seamlessly connected to the grounding of the substrate, hence has superior isolation performance. The shielding wall which isolates the compartments is made by laser scribing and trench filling. First the model of geometry of CPS wall is built up, boundary condition is set and material parameters are assigned. SE performance of CPS is simulated by HFSS software using Finite Element Method (FEM). Manual Mesh is used to improve the accuracy of simulation. Visualized 3D EM field is extracted for analyzing how and to what extent the defects of process degrading the SE. Besides the shielding effectiveness, the conductivity of filling material and the contact resistance between that material and ground pad beneath the CPS trench is studied and correlated to the shielding performance. Finally we improve the shielding performance of CPS and the simulation model we built up is close to measurement. Moreover, a LTE modem with two shielding trenches is made and its performance is verified. This single mode/dual bands LTE modem module with three compartments accommodate digital, RF Tx and RF Rx circuit with size 23×26×1.9 mm only. The RF performance of this modem is excellent, and meets all 3GPP LTE Category 3 and carrier's requirements, passes FCC/CE EMI, GCF and PTCRB certification. It is found that this compartment shielding process is good for consumer grade SiP module both in technology and in commercial terms.
本文介绍了一种新型隔室屏蔽工艺的性能表征。针对可形成多个任意形状屏蔽区域的成型基础SiP模块,开发了CPS工艺。这种隔室屏蔽结构不仅本身占用的空间最小,而且良好的屏蔽性能可以通过缩短隔室间壁两侧和边缘的遮挡距离来减少泄漏,增加更多的放置面积。它减少了屏蔽子电路之间的干扰,例如数字、模拟和射频电路。所述隔室屏蔽结构与基板接地无缝连接,具有优越的隔离性能。隔离隔室的屏蔽壁采用激光刻划和沟槽填充的方法制作。首先建立了CPS墙体的几何模型,设置了边界条件,确定了材料参数;利用HFSS软件对CPS的SE性能进行了有限元模拟。采用手动网格法提高仿真精度。提取可视化的三维电磁场,用于分析工艺缺陷如何及在多大程度上降低SE。除屏蔽效能外,还研究了填充材料的电导率和填充材料与CPS壕下地垫的接触电阻与屏蔽性能的关系。最后改进了CPS的屏蔽性能,所建立的仿真模型与实测结果较为接近。制作了具有双屏蔽沟的LTE调制解调器,并对其性能进行了验证。这种单模/双频LTE调制解调器模块具有三个隔间,可容纳数字,RF Tx和RF Rx电路,尺寸仅为23×26×1.9 mm。该调制解调器射频性能优异,满足3GPP LTE类别3和运营商的所有要求,通过FCC/CE EMI, GCF和PTCRB认证。研究发现,这种隔层屏蔽工艺无论在技术上还是在商业上都适用于消费级SiP模块。
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引用次数: 3
Thermal modeling and characterization of SiC power module under both air cooling and liquid cooling conditions 风冷和液冷条件下SiC电源模块的热建模和特性分析
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028370
Hengyun Zhang, How Yuan Hwang, L. Bu, Jerry Jie Li Aw, D. Rhee
Silicon carbide based power modules are receiving more attention due to their performance advantages over traditional silicon power modules. The demanding operation requirements such as higher power output, faster switching speed, and higher working temperature present great thermal management challenge, which necessitates the analysis and characterization of various thermal interface and bonding layers and cooling technologies. In the present work, a new 3-phase SiC DMOSFET power module is developed with six SiC dies and copper clips, and corresponding cooling technologies are examined under liquid cooling and air cooling conditions. Different thermal assembly layers including flip chip attach, clip attach, direct bonding copper (DBC), heat sink thermal interface materials are examined. It is found that the die attach and clip attach, formed with sintering silver, have the most significant effects on the power module thermal performance than the outer heat sink thermal interface materials. In addition, the die metallization size should be enlarged as much as possible to minimize the internal thermal resistance at flip chip bonding layer. A module thermal resistance is found to be 0.184 K/W under dual side liquid cooling and 0.254 K/W under air cooling condition. A liquid cooled heat sink is fabricated with ceramic based copper fins. A power cycling simulation is also conducted, which indicate that a junction temperature change (ΔT) of 150°C could be attained with 1.5S/1.5S on/off condition and 960 W power input.
基于碳化硅的功率模块由于其优于传统硅功率模块的性能优势而受到越来越多的关注。更高的功率输出、更快的开关速度和更高的工作温度等苛刻的工作要求对热管理提出了巨大的挑战,这就需要对各种热界面和键合层以及冷却技术进行分析和表征。本文设计了一种新型的三相SiC DMOSFET功率模块,采用6个SiC模具和铜夹,并在液冷和风冷条件下研究了相应的冷却技术。研究了不同的热组装层,包括倒装片贴装、夹贴装、直接键合铜(DBC)、散热器热界面材料。研究发现,与外部散热片热界面材料相比,用烧结银形成的模具贴片和夹片贴片对功率模块热性能的影响最为显著。此外,应尽可能扩大模具金属化尺寸,以尽量减少倒装片键合层内部热阻。双侧液冷条件下模块热阻为0.184 K/W,风冷条件下模块热阻为0.254 K/W。用陶瓷基铜翅片制备了一种液冷散热器。功率循环仿真结果表明,在1.5S/1.5S开/关条件下,在960 W输入功率下,结温变化(ΔT)可达到150℃。
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引用次数: 5
Analysis of silicone-based adhesive bond separation 硅基胶粘剂的粘结分离分析
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028346
L. E. Khoong, T. K. Gan, M. B. Young
Silicone-based adhesive bond separations on polymer and ceramic-based samples were analyzed. Scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX), Fourier transform infra-red spectroscopy (FTIR) and Gas chromatography mass spectrometry (GCMS) analyses were conducted on surfaces of glass fiber reinforced polybutylene terephthalate (PBT) and aluminum nitride samples. Further surface analyses, i.e. surface contact angle measurement, X-ray photoelectron spectroscopy (XPS) and time of flight secondary ion mass spectrometry (TOF-SIMS) indicates that the adhesive bond separation could have been caused by excessive sulfur content on the PBT surface and excessive residual organic compound containing hydroxyl functional group on aluminum nitride surface. Potential separation mechanisms of the adhesive bond for these two case studies were also discussed.
分析了硅基粘合剂在聚合物和陶瓷样品上的键分离。采用扫描电镜(SEM)、x射线能谱(EDX)、傅里叶变换红外光谱(FTIR)和气相色谱质谱(GCMS)对玻璃纤维增强聚对苯二甲酸丁二酯(PBT)和氮化铝样品表面进行了分析。进一步的表面分析,如表面接触角测量、x射线光电子能谱(XPS)和飞行时间二次离子质谱(TOF-SIMS)表明,粘结键分离可能是由于PBT表面硫含量过高和氮化铝表面含有过量羟基官能团的有机化合物残留造成的。讨论了这两个案例的潜在分离机制。
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引用次数: 0
Considerations for package routing for DRAM and NAND Flash memory 对DRAM和NAND闪存封装路由的考虑
Pub Date : 2014-12-01 DOI: 10.1109/EPTC.2014.7028309
Wang Ai-Chie, Chong Chin Hui
As the speed performance of memory silicon die advances over the generations, the corresponding package designs must align with the desired package-level performance. This has driven package designers to adopt the appropriate package routing design practices for DDR2 to DDR4 DRAM and NV-DDR to NV-DDR2 NAND Flash memory packages that keep not only the mechanical integrity of the package in mind but also the electrical (signal integrity) aspects of the package. This paper describes the relevant package routing considerations for BOC and COB interposer designs with the goal of meeting the electrical requirements for high-speed devices; these results have been documented to ensure that these routing requirements are checked at the final design review stage to enable Micron to deliver quality products to customers.
随着存储器硅芯片的速度性能一代又一代的进步,相应的封装设计必须与所需的封装级性能保持一致。这促使封装设计人员为DDR2到DDR4 DRAM和NV-DDR到NV-DDR2 NAND闪存封装采用适当的封装路由设计实践,不仅要考虑封装的机械完整性,还要考虑封装的电气(信号完整性)方面。为了满足高速器件的电气要求,本文描述了BOC和COB中间层设计的相关封装路由考虑;这些结果已被记录下来,以确保在最终设计评审阶段检查这些路由要求,使美光能够向客户交付高质量的产品。
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引用次数: 0
期刊
2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
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