基于第一性原理的杂质-空位扩散机制高通量模拟

I. Martín-Bragado, Yumi Park, C. Zechner, Y. Oh
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引用次数: 0

摘要

第一性原理计算是一种方便且经济有效的方法,可以获得解决下一代半导体器件挑战所需的新材料和优化材料的特性。但是,即使有可靠的工具,空位中间杂质扩散的计算也是具有挑战性的,特别是在合金中。这项工作展示了一种算法,通过实施一种方法来计算通用材料中的环机制,使这种计算过程自动化。显示了半导体材料(即Ge在Si中的扩散和As在Si0.5 Ge0.5随机合金中的扩散)和非半导体材料(Al在TiN中的扩散)的结果。这些结果强调了环机制在理解晶体材料中杂质扩散性方面的重要性,以及b)需要自动算法来处理采样的复杂性,并为此类计算生成一致的配置。
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High Throughput Simulation On The Impurity-Vacancy Diffusion Mechanism Using First-Principles
First principle calculations are a convenient and cost effective procedure to obtain the properties of the new and optimized materials required to solve the challenges of the next generation of semiconductor devices. But, even with reliable tools, the computation of the vacancy intermediated impurity diffusion can be challenging, especially in alloys. This work shows an algorithm to automate the process of such calculation by implementing a methodology tocompute ring mechanisms in generic materials. Results for semiconductor (namely, Ge diffusion in Si and As diffusion in a Si0.5 Ge0.5 random alloy) and non-semiconductor materials (Al diffusion in TiN) are shown. The results stress botha) the importance of the ring mechanism in understanding the diffusivity of impurities in crystalline materials, and b) the need for automatic algorithms that deal with the complexity of sampling and generating consistent configurations for such calculations.
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