用于高压直流变流器的大面积高压晶闸管

K. Morita, T. Yatsuo, M. Okamura, I. Kojima
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引用次数: 2

摘要

研制出了额定功率为1500A、4000V的用于高压直流输电系统变换器的大面积高压晶闸管。通过对铝扩散技术的改进,获得了较高的扩散精度和较长的载流子寿命。为了将有效导电面积增加到晶圆面积的80%,采用了sigma形边缘轮廓技术。伽马射线照射用于精确控制反向回收装药。采用考虑杂质分布的计算机辅助设计方法,对装置的动态特性进行了计算,并进行了结构设计。
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Large-area, high-voltage thyristors for HVDC converter
Large-area, high-voltage thyristors with the ratings of 1500A, 4000V for converters of high-voltage direct current transmission systems have been developed. By improvement in the aluminum diffusion technique, high accuracy of diffusion and long carrier lifetime were attained. To increase the effective conducting area up to eighty percent of the wafer area, the sigma shaped edge contouring technique has been used. A gamma-ray irradiation was used for precise control of the reverse recovery charge. By using a computer aided design which considered the impurity profile, the dynamic characteristics of the device were calculated and the structure was designed.
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