{"title":"低光束能量的纳米探测，寻址当前和未来节点","authors":"A. Rummel, Andrew Smith","doi":"10.31399/asm.edfa.2022-2.p012","DOIUrl":null,"url":null,"abstract":"\n This article discusses the challenges associated with nanoprobing advanced technology node devices and explains how to optimize SEM images for beam voltages of 100 eV or less.","PeriodicalId":431761,"journal":{"name":"EDFA Technical Articles","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoprobing at Low Beam Energy, Addressing Current and Future Nodes\",\"authors\":\"A. Rummel, Andrew Smith\",\"doi\":\"10.31399/asm.edfa.2022-2.p012\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n This article discusses the challenges associated with nanoprobing advanced technology node devices and explains how to optimize SEM images for beam voltages of 100 eV or less.\",\"PeriodicalId\":431761,\"journal\":{\"name\":\"EDFA Technical Articles\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EDFA Technical Articles\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31399/asm.edfa.2022-2.p012\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EDFA Technical Articles","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.edfa.2022-2.p012","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoprobing at Low Beam Energy, Addressing Current and Future Nodes
This article discusses the challenges associated with nanoprobing advanced technology node devices and explains how to optimize SEM images for beam voltages of 100 eV or less.
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