亚微米级栅全耗尽SOI nmosfet低频噪声的来源研究

A. R. Molto, R. T. Doria, M. de Souza, M. Pavanello
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引用次数: 1

摘要

本文研究了亚微米分级通道SOI nmosfet的低频噪声(LFN)行为,作为之前工作的延续,由Oki半导体公司以150纳米技术制造,研究了这些器件的噪声源。研究了通道长度减小和栅极偏置依赖对线性偏置器件LFN的影响。确定了可用于BSIM类spice模型的有效阱密度和KF常数。
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On the origin of low-frequency noise of submicron Graded-Channel fully depleted SOI nMOSFETs
This paper deals with the Low-Frequency Noise (LFN) behavior of submicron Graded-Channel SOI nMOSFETs, fabricated in a 150 nm Technology from Oki Semiconductors as a continuation from previous works, looking at the noise sources of these devices. The effects of channel length reduction and gate bias dependence on the LFN of devices biased in linear regime are investigated. The effective trap density and the KF constant, which can be used in BSIM SPICE-like models, are determined.
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