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2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)最新文献

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Array of miniaturized structures applied to small-labs development 应用于小型实验室开发的小型化结构阵列
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298115
A. R. Leite, R. R. Lima, E. Simões, M. L. P. Silva
The aim of this work was to simulate, produce and tests a small-lab that possesses an array of miniaturized 3D structures with four different unit operations. These structures showed to be useful for particle removal and pre-concentration in sample pre-treatment in Chemical analysis or mixing and spray formation in Chemical Engineering synthesis. The device proposed showed to be a versatile and low-cost system that can be built using conventional tools.
这项工作的目的是模拟、生产和测试一个小型实验室,该实验室拥有一系列具有四种不同单元操作的小型化3D结构。这些结构对化学分析中样品预处理中的颗粒去除和预浓缩或化学工程合成中的混合和喷雾形成都很有用。该装置被证明是一个通用的、低成本的系统,可以使用传统的工具来建造。
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引用次数: 1
Numerical evaluation of warpage in PoP encapsulated semiconductors PoP封装半导体翘曲的数值评估
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298127
Fabiano A. Colling, C. Moraes, Celso Peter, E. Rhod, W. Hasenkamp, Dong-Hyun Park, T. Oh
The Package on Package (PoP) emerges as a package alternative to increase the number of transistors in the same area by stacking thin chips. The differences in thermal and mechanical properties of the various materials that constitute the encapsulated chip can result in the device warpage. In this study the thermomechanical behavior of an electronic device encapsulated by the Package on Package technology was simulated. The factors that contribute to generate warping in semiconductor encapsulated with PoP technology during the solder reflow process were evaluated. This study evaluates the conditions and process parameters during fabrication of a 40 μm thick chip molded with one kind of Epoxy Molding Compound (EMC). Through the warpage measurements by Moire interferometry it was possible to build correlations with computer simulation of the device. The results of this comparison were used as a basis for simulation and validation of input data used in other settings for three different thicknesses of silicon chips (40, 100 and 200 microns) and two different types of EMC (EMC1 and EMC2). In the simulations, it was found the warpage of the 40 microns thick chips, considering the different epoxy compounds, decreased by about 40% in the top chip, the reduction obtained in the 100 microns thick chips was in the order of 35%, while in the 200 microns thick chips the warpage decreased by about 3%. The results show the importance of simulation to predict the tendency of warping when there are variations in the fabrication process parameters.
封装上封装(PoP)作为一种封装替代方案出现,通过堆叠薄芯片来增加相同面积的晶体管数量。构成封装芯片的各种材料的热性能和机械性能的差异会导致器件翘曲。本文对采用包上包封装技术封装的电子器件的热力学行为进行了模拟。分析了PoP封装半导体焊料回流过程中产生翘曲的影响因素。研究了用一种环氧成型化合物(EMC)制备40 μm厚芯片的工艺条件和工艺参数。通过云纹干涉测量的翘曲测量,可以建立与计算机模拟装置的相关性。该比较的结果被用作模拟和验证其他设置中使用的输入数据的基础,用于三种不同厚度的硅芯片(40、100和200微米)和两种不同类型的EMC (EMC1和EMC2)。在模拟中发现,考虑不同环氧化合物的情况下,40微米厚的薄片在顶部的翘曲量减少了约40%,在100微米厚的薄片中翘曲量减少了约35%,在200微米厚的薄片中翘曲量减少了约3%。结果表明,当加工工艺参数发生变化时,模拟对预测翘曲趋势具有重要意义。
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引用次数: 1
On the origin of low-frequency noise of submicron Graded-Channel fully depleted SOI nMOSFETs 亚微米级栅全耗尽SOI nmosfet低频噪声的来源研究
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298113
A. R. Molto, R. T. Doria, M. de Souza, M. Pavanello
This paper deals with the Low-Frequency Noise (LFN) behavior of submicron Graded-Channel SOI nMOSFETs, fabricated in a 150 nm Technology from Oki Semiconductors as a continuation from previous works, looking at the noise sources of these devices. The effects of channel length reduction and gate bias dependence on the LFN of devices biased in linear regime are investigated. The effective trap density and the KF constant, which can be used in BSIM SPICE-like models, are determined.
本文研究了亚微米分级通道SOI nmosfet的低频噪声(LFN)行为,作为之前工作的延续,由Oki半导体公司以150纳米技术制造,研究了这些器件的噪声源。研究了通道长度减小和栅极偏置依赖对线性偏置器件LFN的影响。确定了可用于BSIM类spice模型的有效阱密度和KF常数。
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引用次数: 1
New hybrid structures based on CdSe/ZnS quantum dots and multilayer graphene for photonics applications 基于CdSe/ZnS量子点和多层石墨烯的新型杂化结构的光子学应用
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298154
A. Alaferdov, R. Savu, S. Račkauskas, T. Rackauskas, M. A. Canesqui, Y. A. Gromova, Anna O. Orlova, Alexander V. Baranov, A. Fedorov, S. Moshkalev
Fabrication of novel micron-scale structures based on multi-layer graphene and quantum dots (QD) hybrids is presented. Two types of CdSe/ZnS (core/shell) QDs with diameters of 5.3 and 2.5 nm and photoluminescence peaks at 630 and 530 nm, respectively, were used. The photoresponse for illumination by a 473 nm wavelength laser was found to change polarity for these two types of QDs, being positive for larger and negative to smaller ones. The presented photo-resistive devices can be used for studies of the mechanisms responsible for photoinduced change of graphene layer conductivity in presence of QDs.
提出了基于多层石墨烯和量子点(QD)杂化的新型微米尺度结构的制备方法。两种CdSe/ZnS(核/壳)量子点直径分别为5.3和2.5 nm,发光峰分别为630和530 nm。在波长为473 nm的激光照射下,这两种量子点的光响应都发生了极性变化,较大的量子点为正,较小的量子点为负。所提出的光阻器件可用于研究量子点存在下石墨烯层电导率的光致变化机制。
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引用次数: 1
Dynamic threshold voltage influence on Ge pMOSFET hysteresis 动态阈值电压对Ge pMOSFET迟滞的影响
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298118
A. Oliveira, P. Agopian, J. Martino, E. Simoen, C. Claeys, H. Mertens, N. Collaert, A. Thean
This paper presents for the first time an experimental analysis of germanium pMOSFETs operating in conventional, dynamic threshold voltage (DT, where VBS = VGS) and enhanced dynamic threshold voltage (eDT, where VBS=k*VGS) modes. In addition, there are two different HfO2/Al2O3 gate stack thicknesses under evaluation. The subthreshold swing (SS) improves 60% in eDT (k = 2) mode compared to the conventional mode (k = 0) thanks to the dynamic threshold voltage reduction. The thinnest Al2O3 layer presents higher drain current hysteresis in the conventional mode and it increases when the channel length decreases. In contrast, the hysteresis effect reduces from 67 mV to lower than 4 mV, i.e. practically minimized when the dynamic threshold voltage is applied.
本文首次对锗pmosfet在常规、动态阈值电压(DT,其中VBS= VGS)和增强动态阈值电压(eDT,其中VBS=k*VGS)模式下的工作进行了实验分析。此外,还对两种不同的HfO2/Al2O3栅层厚度进行了评价。由于动态阈值电压降低,在eDT (k = 2)模式下,与传统模式(k = 0)相比,亚阈值摆幅(SS)提高了60%。在常规模式下,最薄的Al2O3层表现出较高的漏极电流滞后,并且随着沟道长度的减小而增大。相比之下,当施加动态阈值电压时,迟滞效应从67 mV降低到4 mV以下,即几乎最小化。
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引用次数: 1
All-optical Majority and Feynman gates in photonic crystals 光子晶体中的全光多数门和费曼门
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298150
L. P. Pedraza Caballero, J. P. Vasco, P. Guimarães, Omar P. Vilela Neto
In this paper we propose, for the first time, all-optical Majority and Feynman gates in two-dimensional silicon photonic crystals. Photonic crystals are optical semiconductor nanodevices, formed by a periodicity in one, two or three dimensions in the refractive index of a macroscopic media. These devices can operate with low power consumption, high speed and low dissipation of energy to heat. A photonic crystal waveguide is a perfect platform to accomplish the design of all-optical devices. The functionality of logic gates proposed here is achieved due to the light beam interference effect. For the Majority gate, the simulation results show that the transmission to define logic 0 is less than 35% and logic 1 greater than 85%. In addition, for the Feynman gate the transmission to define logic 0 and logic 1 are ≤10% and ≥ 40%, respectively. In order to perform the simulations we applied the FDTD method in the MEEP software package. The Majority and Feynman logic devices presented here can be potential candidates for the realization of low power photonic computational circuits.
在本文中,我们首次提出了二维硅光子晶体的全光多数门和费曼门。光子晶体是一种光学半导体纳米器件,由宏观介质折射率在一维、二维或三维上的周期性形成。这些器件具有低功耗、高速度和低热量耗散的特点。光子晶体波导是实现全光器件设计的理想平台。本文提出的逻辑门的功能是由于光束干涉效应而实现的。对于多数门,仿真结果表明,定义逻辑0的传输小于35%,定义逻辑1的传输大于85%。此外,对于费曼门,定义逻辑0和逻辑1的传输量分别为≤10%和≥40%。为了进行仿真,我们在MEEP软件包中应用了时域有限差分方法。本文提出的Majority和Feynman逻辑器件可以成为实现低功率光子计算电路的潜在候选器件。
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引用次数: 16
Investigations of capacitively-coupled plasmas by electrostatic probe technique 用静电探针技术研究电容耦合等离子体
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298131
G. Cirino, R. M. Castro, M. Pisani, P. Verdonck, R. Mansano, M. Massi, R. Pessoa, L. Barea, T. M. Brahim, H. Maciel
This work reports on the electric characterization of capacitively-coupled RF plasmas by employing electrostatic (Langmuir) probes. Experiments with argon, oxygen and sulfur hexafluoride (SF6) plasmas were carried out. The floating potential and cathode self-bias, as well as the shape of the Langmuir probe current-voltage characteristics were measured and interpreted. The current-voltage characteristic for SF6 plasmas showed a strong variation in the floating potential, and a distortion in the region of electron retarding. An unexpected behavior of the curves was observed for the higher pressure discharge regime, at 100 mTorr. The cathode self-bias also was very different for SF6 plasmas when compared to more electropositive oxygen and argon discharges. The results obtained pointed to the massive presence of negative ions in SF6 plasmas.
本文报道了利用静电(朗缪尔)探针对电容耦合射频等离子体的电特性。用氩、氧和六氟化硫(SF6)等离子体进行了实验。对浮电位和阴极自偏置以及Langmuir探针的形状进行了测量和解释。SF6等离子体的电流-电压特性在浮动电位中表现出强烈的变化,并且在电子延迟区出现畸变。在100 mTorr的高压放电状态下,观察到曲线的意外行为。与氧和氩放电相比,SF6等离子体的阴极自偏置也有很大不同。结果表明SF6等离子体中大量存在负离子。
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引用次数: 0
Imaging amplification for minimally invasive medical devices 微创医疗设备的成像放大
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298117
J. Correia, J. M. Gomes, C. G. Costa, R. Wolffenbuttel, J. Carmo
The performance of minimally invasive devices for medical inspection could be significantly improved by an amplification imaging module (AIM), which can be considered a highly miniaturized digital microscope to image in-vivo tissue in real-time. An example is the magnification provided by the bulky conventional endoscope that allows the recognition of the affected mucosa with higher precision as compared to normal endoscopic inspection and enables the differentiation of affected tissue from healthy surroundings. Therefore, an AIM that can be integrated in very small medical devices as optical tool for ophthalmologic, thoracic and gastro endoscopic diagnostic will be a tremendous breakthrough. An especially microfabricated 200 μm thick PDMS lens, limiting the total length of the optical system to about 11 mm plus 4 mm for the lateral lens assembly (suitable to include in a 30 mm×11 mm cylindrical medical device) was assembled with more 3 commercial lenses. The height, radius of curvature and focal length of the PDMS lens can be changed by design and were selected to meet the specified system performance, which is set by the imaging requirements. The fabrication process was based in a hanging droplet approach, which is a very low-cost and effective method for obtaining lens with the desired properties. Several analyses were performed showing good performance of the lens system: a paraxial magnification of 14 times was achieved with a Modulation Transfer Function (MTF) around 37% at 50 lp/mm and maximum distortion about 1.83%.
放大成像模块(AIM)可以显著提高微创医疗检查设备的性能,该模块可以被认为是一种高度小型化的数字显微镜,可以实时对体内组织进行成像。一个例子是由笨重的传统内窥镜提供的放大,与普通内窥镜检查相比,它可以以更高的精度识别受影响的粘膜,并能够将受影响的组织与健康环境区分开来。因此,将AIM集成到非常小的医疗设备中,作为眼科、胸腔镜和胃镜诊断的光学工具,将是一个巨大的突破。一个特别微加工的200 μm厚的PDMS透镜,将光学系统的总长度限制在约11 mm加上4 mm的横向透镜组件(适合包括在30 mm×11 mm的圆柱形医疗设备中)与3个以上的商业透镜组装在一起。PDMS透镜的高度、曲率半径和焦距可以通过设计改变,并根据成像要求选择满足指定系统性能的透镜。制备过程基于悬滴法,这是一种非常低成本和有效的方法,可以获得具有所需性能的透镜。几项分析显示了透镜系统的良好性能:在50 lp/mm时,调制传递函数(MTF)约为37%,近轴放大倍数为14倍,最大畸变约为1.83%。
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引用次数: 0
Boosting the electrical performance of MOSFET switches by applying Ellipsoidal layout style 采用椭球形布局方式提高MOSFET开关的电学性能
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298122
Marcello Marcelino Correia, S. Gimenez
Through three-dimensional numerical simulations, we investigate the use of ellipsoidal layout style on the electrical performance of a Metal-Oxide-Semiconductor (MOS) Field Effect Transistors (MOSFETs) switch. This gate geometry is capable to adding two new effects in the MOSFET structure named Longitudinal Corner Effect (LCE) and Parallel Connection of MOSFET with Different Channel Lengths Effect (PAMDLE) that result in the boosting of the main digital figures of merit. The main findings of this work demonstrate that the Ellipsoidal gate geometry is a viable alternative layout style to implement MOSFET switches to significantly improve its electrical performance and, consequently, the performance of the DC/DC converters.
通过三维数值模拟,我们研究了椭球形布局方式对金属氧化物半导体场效应晶体管(mosfet)开关电性能的影响。这种栅极几何结构能够在MOSFET结构中增加两种新效应,即纵向角效应(LCE)和具有不同沟道长度效应的MOSFET并联效应(PAMDLE),从而提高主要数字性能。这项工作的主要发现表明,椭球形栅极几何形状是实现MOSFET开关的可行替代布局风格,可显着提高其电气性能,从而提高DC/DC转换器的性能。
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引用次数: 4
InAs quantum dots on GaAs for intermediate band solar cells 中间波段太阳能电池用砷化镓上的InAs量子点
Pub Date : 2015-10-15 DOI: 10.1109/SBMICRO.2015.7298153
D. Micha, E. Weiner, R. Jakomin, R. Kawabata, R. Mourão, M. Pires, P. L. Souza
Quantum dot intermediate band solar cells (QD-IBSC) have been produced in order to pave the road to high efficiency solar cells, demonstrating sub-bandgap absorption. Even though the obtained figures of merit are still lower than those of the samples without the quantum dots, optical activity of the nanostructures has been demonstrated. While the photovoltaic activity of the QD-IBSC is observed for wavelengths until 1000 nm, it vanishes at around 900 nm for the reference sample. We conclude that improvement in the QD morphological structure is still needed to minimize surface recombination and that more layers and a higher QD density is mandatory to increase the overall sub-bandgap absorption. Finally, a potential change in the solar cell growth conditions is suggested.
量子点中间带太阳能电池(QD-IBSC)具有亚带隙吸收特性,为实现高效太阳能电池铺平了道路。尽管所得的性能值仍然低于没有量子点的样品,但已经证明了纳米结构的光学活性。虽然QD-IBSC的光伏活性在波长为1000 nm之前被观察到,但它在参考样品的900 nm左右消失。我们得出结论,改进量子点形态结构仍然需要减少表面复合,更多的层和更高的量子点密度是增加整体子带隙吸收的必要条件。最后,提出了太阳能电池生长条件的潜在变化。
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引用次数: 1
期刊
2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)
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