Y. Liao, Changcheng Chen, Chien-Lung Liang, Kwang-Lung Lin, A. Wu
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The in situ XRD analysis showed an integrated intensity decline of diffraction peaks (up to a 90% reduction rate) and the buildup of lattice strain (up to 0.68% beyond the yield point) within the pure Sn strip, revealing a crystallinity degradation phenomenon under electromigration. The atomic-scale lattice appearance showed direct evidence of dislocation production under electromigration as a result of the plastic deformation. The introduction of dislocations formed sub-lattices with various crystal orientations that were responsible for the integrated intensity decline. The increase in electrical resistance after the electromigration experiment corresponded to the consequences of the observed lattice disruption and lattice strain accumulation phenomena. 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引用次数: 19
摘要
文献中积累了大量关于纯锡中电迁移现象的有趣发现。大多数研究都揭示了材料在电迁移作用下的热力学稳定状态。我们对纯锡在5.5 - 7.5 × 103 a /cm2下5.5 h的电迁移进行了全面研究,揭示了对结晶度、微观结构和电学性能的影响。通过原位同步x射线衍射(XRD)和高分辨率透射电子显微镜(HRTEM)的研究,本文从结晶性变化的角度对电迁移下的电学性质变化提供了不同的解释。原位XRD分析表明,纯锡条内的衍射峰强度整体下降(还原率高达90%),晶格应变增加(超过屈服点超过0.68%),显示出电迁移作用下的结晶度退化现象。原子尺度的晶格形貌显示了塑性变形导致的电迁移导致位错产生的直接证据。位错的引入形成了具有不同晶体取向的亚晶格,导致了综合强度的下降。电迁移实验后电阻的增加与观察到的晶格破坏和晶格应变积累现象的结果相对应。热基准实验证明,非热电迁移效应比热电迁移效应对结晶性和电迁移电阻响应的影响更大。
A Comprehensive Study of Electromigration in Pure Sn: Effects on Crystallinity, Microstructure, and Electrical Property
Abstract The literature has accumulated plenty of interesting findings of electromigration-induced phenomena in pure Sn. Most of the researches revealed the thermodynamically steady states of materials under electromigration. We presented a comprehensive study of electromigration in pure Sn at 5.5–7.5 × 103 A/cm2 for 5.5 h revealing the effects on crystallinity, microstructure, and electrical property. The present work provided a divergent explanation about the electrical property variation under electromigration by introducing the crystallinity change aspect, as evidenced by the in situ synchrotron X-ray diffraction (XRD) and high-resolution transmission electron microscope (HRTEM) investigations. The in situ XRD analysis showed an integrated intensity decline of diffraction peaks (up to a 90% reduction rate) and the buildup of lattice strain (up to 0.68% beyond the yield point) within the pure Sn strip, revealing a crystallinity degradation phenomenon under electromigration. The atomic-scale lattice appearance showed direct evidence of dislocation production under electromigration as a result of the plastic deformation. The introduction of dislocations formed sub-lattices with various crystal orientations that were responsible for the integrated intensity decline. The increase in electrical resistance after the electromigration experiment corresponded to the consequences of the observed lattice disruption and lattice strain accumulation phenomena. The thermal benchmark experiments evidenced the predominant athermal electromigration effect, rather than the thermal one, on the crystallinity and electrical resistance responses to electromigration.