大尺寸通硅通孔(TSV)中间层封装翘曲预测与寿命分析

Meiying Su, Cheng Chen, Minghao Zhou, Jun Li, Liqiang Cao
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引用次数: 2

摘要

在研究中,翘曲是大尺寸TSV中间封装技术需要研究的一个严重问题。对于TSV中间体封装来说,最重要的任务是讨论翘曲对某些关键装配工艺的影响。本文详细描述了两种装配过程:一种是基于条带级装配过程,另一种是基于单个封装级装配过程。采用有限元法对TSV中间件、模具件、加强件等件的翘曲变形进行了仿真分析。此外,基于Darveaux应变能密度模型,研究了恶劣TC条件下(- 65℃~ 150℃)的板级寿命预测。
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Warpage Prediction and Lifetime Analysis for Large Size Through-silicon-via (TSV) Interposer Package
In the study, warpage as a serious problem need to be investigated for large size TSV interposer package technology. The most important task for TSV interposer package is to discuss the warpage influence on some critical assembly processes. In the paper, two kinds of assembly processes were described in detail: one is based on strip-level assembly processes, the other is based on individual package-level one. By using finite element method, warpage simulation results were analyzed for TSV interposer attach, die attach, stiffener attach, etc. Besides, board-level lifetime prediction under the harsh TC condition (−65 °C ~ 150 °C) was investigated in the study based on Darveaux’s model of strain energy density.
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