裸SOI晶圆上偏置不稳定性的直接点接触表征

C. Márquez, N. Rodriguez, C. Fernandez, A. Ohata, F. Gámiz, F. Allibert, S. Cristoloveanu
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引用次数: 1

摘要

偏置不稳定性是一个影响MOS晶体管栅极在较高电压下受力时阈值电压的可靠性问题。我们首次使用伪mosfet结构表征裸SOI晶圆的不稳定性。系统地研究了正负应力脉冲对空穴通道和电子通道性质的影响。讨论了不稳定性的来源、退化随时间的依赖关系以及应力作用后的恢复关系
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Direct point-contact characterization of Bias instability on bare SOI wafers
Bias Instability is a reliability issue affecting the threshold voltage of a MOS transistor when the gate is stressed with relatively high voltage. For the first time, we characterize the instability of bare SOI wafers using a Pseudo-MOSFET configuration. The effect of positive and negative stress pulses on the properties of both hole and electron channels is systematically investigated. The origins of the instability, the dependence of the degradation with time, and the recovery after the stress have been discussed.dependence
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