用于低功耗、低成本四极质谱仪的硅微机械质量过滤器

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659797

J.J. Tullstall, S. Taylor, R. Syms, T. Tate, M.M. Ahmad

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引用次数: 12

摘要

本文介绍了一种新型硅微机械质量过滤器的四极杆质谱仪的设计、实现和初步试验。讨论了该装置的结构及其在传统离子源上的安装和在真空系统中的测试。给出了该质量透镜的工作结果，包括质谱，以及笼形电压、发射电流和压力对其性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer

This article considers the design, realisation and initial tests of a quadrupole mass spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.

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Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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