硅基远红外测热计的不同像素模式

2017 Silicon Nanoelectronics Workshop (SNW) Pub Date : 2017-06-01 DOI:10.23919/SNW.2017.8242321

Feng-Renn Juang, W. Yeh, Wei-Chih Chen, Ming-Feng Chung

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引用次数: 0

摘要

研究了具有不同像元模式的非晶硅热辐射计在远红外探测中的应用。测量了浮腔结构器件的电阻和电阻温度系数(TCR)值。结果表明，正常的腿部几何形状具有高TCR(~ - 4%/°C)和中等阻力。因此，像素模式适用于红外探测应用。

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Different pixel patterns of Si-based far infrared bolometers

Amorphous silicon bolometers with different pixel patterns are investigated for far infrared detection. Devices with floating resonator structure are measured for resistances and temperature coefficient of resistance (TCR) values. The results show normal leg geometry has high TCR (∼ −4%/°C) and moderate resistance. Thus the pixel pattern is suitable for infrared detecting applications.

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2017 Silicon Nanoelectronics Workshop (SNW)

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