{"title":"可自由移动三维微结构的新型微立体光刻技术——亚微米分辨率超IH工艺","authors":"Koji Ikuta, Shoji Maruo, S. Kojima","doi":"10.1109/MEMSYS.1998.659770","DOIUrl":null,"url":null,"abstract":"We have developed a drastically advanced micro stereo lithography named \"Super IH process\". It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"516 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"72","resultStr":"{\"title\":\"New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution\",\"authors\":\"Koji Ikuta, Shoji Maruo, S. Kojima\",\"doi\":\"10.1109/MEMSYS.1998.659770\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed a drastically advanced micro stereo lithography named \\\"Super IH process\\\". It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process.\",\"PeriodicalId\":340972,\"journal\":{\"name\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"volume\":\"516 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"72\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1998.659770\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659770","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
New micro stereo lithography for freely movable 3D micro structure-super IH process with submicron resolution
We have developed a drastically advanced micro stereo lithography named "Super IH process". It is the most unique feature of this process that liquid UV (Ultra Violet) polymer can be solidified at a pinpoint position in 3D space by optimizing apparatus and focusing condition of the laser beam. This pinpoint exposure enables us to make real 3D micro structure without any support parts nor sacrificial layers. Therefore freely movable micro mechanism such as gear rotators and free connected chains can be made easily. Moreover, several problems which conventional micro stereo lithography has are completely solved. Submicron fabrication resolution has first achieved by simple desk top apparatus. Since total fabrication time of the super IH process is extremely fast, it is easy to apply to mass productive 3D micro fabrication process.
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