基于平面光波电路的光子收发器晶圆级集成技术的研究

L. Lorenz, S. Sohr, R. Rieske, K. Nieweglowski, T. Zerna, K. Wolter
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引用次数: 2

摘要

对于传感器系统和数据通信来说,光电集成技术是传统电子系统集成的一个很好的替代方案。为了使光子集成技术比电子集成技术更具吸引力,需要采用适合批量生产的电子封装标准工艺的封装概念。本文提出了一种光子收发器集成技术。为了利用电子封装中常用的开发环境和工艺,平面组装策略是首选。这就是为什么这个概念使用平面光波电路(PLC)和无源光纤芯片耦合的玻璃基板。通过使用倒装芯片vcsel和光电二极管,标准的拾取和放置组装成为可能。因此,大规模的晶圆级制造是可行的。此外,本文还特别关注了光子集成的发展过程。到目前为止,还没有开发环境可以在一个工作流程中对整个光学设备进行建模或模拟。模型的每一个子部分都需要一个工具。通过使用3D-CAD,本工作提出将多个子模型合并到一个工具中,从而大大简化了平面光学器件的开发。
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Development of a wafer-level integration technology for photonic transceivers based on planar lightwave circuits
For sensor systems and data communication, electro optical integration technologies are an auspicious alternative to conventional electronic system integration. To make the photonic integration more attractive compared to electronic integration technologies, packaging concepts are required which are suitable for mass production using standard processes of the electronics packaging. In this paper, a photonic transceiver integration technology is proposed. To take advantage of the development environments and processes commonly used in electronics packaging, a planar assembly strategy is preferred. That is why the concept uses glass substrates with planar lightwave circuits (PLC) and passive fiber chip coupling. By the use of flip-chip VCSELs and photodiodes, standard pick-and-place assembly becomes possible. Hence, a wafer-level manufacturing in high quantities is feasible. Additionally, the development processes for the photonic integration are of special interest in this paper. Until now, there is no development environment available to model or simulate entire optical devices in one workflow. Every sub part of the model requires a single tool instead. By using 3D-CAD, this work proposes to merge several sub-models into a single tool and achieves largely a simplified development of planar optical devices.
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