LGT-X基板上SAW参数和器件性能的测量和预测

D. Malocha, M. D. da Cunha, E. Adler, D. Puccio, K. Knapp
{"title":"LGT-X基板上SAW参数和器件性能的测量和预测","authors":"D. Malocha, M. D. da Cunha, E. Adler, D. Puccio, K. Knapp","doi":"10.1109/FREQ.2001.956189","DOIUrl":null,"url":null,"abstract":"SAW material parameters have been extracted for LGT X-cut material at various propagation angles. The extracted parameters of velocity, coupling and TCD give good correlation to predicted results based on fundamental LGT material measurements previously reported. SAW delay lines, resonators and transversely coupled resonator (TCR) have been fabricated and the initial results from experiments are presented. The results indicate that the LGT material parameters previously reported will yield reliable predictions, although the precise temperature effects are not at the same level of refinement as in quartz. Based on device results, the current LGT material used is of a high quality and suitable for SAW device applications.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"414 19","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Measurements and predictions of SAW parameters and device performance on LGT-X substrates\",\"authors\":\"D. Malocha, M. D. da Cunha, E. Adler, D. Puccio, K. Knapp\",\"doi\":\"10.1109/FREQ.2001.956189\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"SAW material parameters have been extracted for LGT X-cut material at various propagation angles. The extracted parameters of velocity, coupling and TCD give good correlation to predicted results based on fundamental LGT material measurements previously reported. SAW delay lines, resonators and transversely coupled resonator (TCR) have been fabricated and the initial results from experiments are presented. The results indicate that the LGT material parameters previously reported will yield reliable predictions, although the precise temperature effects are not at the same level of refinement as in quartz. Based on device results, the current LGT material used is of a high quality and suitable for SAW device applications.\",\"PeriodicalId\":369101,\"journal\":{\"name\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"volume\":\"414 19\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2001.956189\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2001.956189","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

提取了LGT x切割材料在不同传播角下的SAW材料参数。所提取的速度、耦合和TCD参数与以往报道的基于LGT材料基本测量的预测结果具有良好的相关性。制作了SAW延迟线、谐振器和横向耦合谐振器(TCR),并给出了初步实验结果。结果表明,先前报道的LGT材料参数将产生可靠的预测,尽管精确的温度效应与石英的细化程度不同。根据器件结果,目前使用的LGT材料质量高,适合SAW器件应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Measurements and predictions of SAW parameters and device performance on LGT-X substrates
SAW material parameters have been extracted for LGT X-cut material at various propagation angles. The extracted parameters of velocity, coupling and TCD give good correlation to predicted results based on fundamental LGT material measurements previously reported. SAW delay lines, resonators and transversely coupled resonator (TCR) have been fabricated and the initial results from experiments are presented. The results indicate that the LGT material parameters previously reported will yield reliable predictions, although the precise temperature effects are not at the same level of refinement as in quartz. Based on device results, the current LGT material used is of a high quality and suitable for SAW device applications.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Study of flicker phase modulation and amplitude modulation noise in field effect transistor amplifiers Direct bonded quartz resonators High-temperature acoustic loss in. AT-cut, BT-cut and SC-cut quartz resonators A 2.5 ppm fully integrated CMOS analog TCXO Engineering time: inventing the quartz wristwatch
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1