芯片背面污染导致的片上铅封装开裂失效

M. Aamagi, H. Seno, K. Ebe, R. Baumann, H. Kitagawa
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引用次数: 17

摘要

同时增加模具尺寸和减小封装尺寸的要求日益严峻,使得新型表面贴装技术的机械稳定性成为人们关注的主要问题。芯片背面与环氧成型树脂之间的界面分层导致的封装裂纹是片上铅封装的主要失效模式。这种界面分层是由晶圆带胶粘剂污染背面造成的。介绍了导致LOC封装中界面分层的背表面和胶带胶粘剂的物理化学参数,并提出了一种缓解该问题的方法。为了研究胶粘剂属性对界面分层的影响,我们用各种不同的基聚合物、低聚物、交联剂、激发剂和添加剂制备了晶圆带胶粘剂样品。用扫描电子显微镜(SEM)和扫描声断层扫描(SAT)技术测定了这些不同粘合剂留下的背面污染的程度和类型。用粘弹性、颗粒数、水接触角和原子力显微镜(AFM)测量对胶粘剂和芯片背面表面进行了表征。
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Cracking failures in lead-on-chip packages induced by chip backside contamination
The increasingly severe demands of concurrently increasing die size while reducing package size have made the mechanical stability of novel surface mount technologies a primary concern. Package cracks induced by interfacial delamination between the chip backside surface and the epoxy molding resin are a major failure mode in Lead-On-Chip (LOC) packages. This interfacial delamination is caused by contamination of the backside surface by the wafer tape adhesive. The physical and chemical parameters of the backside surface and tape adhesive which lead to interfacial delaminations in LOC packages are described along with a method to alleviate the problem. To investigate which adhesive attributes impacted interfacial delamination, wafer tape adhesive samples were prepared with a variety of different base polymers, oligomers, cross-linking agents, initiative agents, and additive agents. The degree and type of backside contamination left by these various adhesives was determined with scanning electron microscope (SEM) and scanning acoustic tomography (SAT) techniques. The adhesive and the chip backside surfaces were characterised with viscoelastic, particle count, water contact angle, and atomic force microscope (AFM) measurements.<>
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Development of a tapeless lead-on-chip (LOC) package A photosensitive-BCB on laminate technology (MCM-LD) A PC program that generates a model of the parasitics for IC packages Compact planar optical devices (CPODs) by CVD technology Predicting solder joint shape by computer modeling
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