先进微互连技术在薄膜多芯片模块上的实现

M. Interrante, H. Clearfield, K. Beckham, L. Economikos
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引用次数: 0

摘要

多芯片模块(MCM)的性能最终取决于其组件之间的信号传播延迟。随着骰子上的1/0计数和更高的工作频率的增加,开发细间距互连技术至关重要。此外,随着多芯片模块在商业应用中获得认可,将有必要在单个基板上组合从各种来源获得的骰子。这些骰子可能有不同的互连技术。作为ARPA特定应用电子模块计划的一部分,我们设计并制造了一种薄膜基板,该基板包含(焊接)倒装芯片,线键,TAB和分立元件。在这个摘要中,我们描述了模块独特的互连方面。这包括使用激光超声键合(LSB)来连接一个精细的(外引线键合)螺距标签模具,一种同步线微连接技术,允许定制模块上某些功能的功能,以及与三种最常见的互连技术兼容的顶部表面冶金。
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Implementation of Advanced Micro-Interconnection Technologies on a Thin-Film Multichip Module
The performance of multichip modules (MCM's) is ultimately governed by the signal propagation delay between its components. With both increasing 1/0 counts on dice and higher operating frequencies, it is critical to develop fine pitch interconnection techniques. Additionally, as multichip modules gain acceptance in commercial applications, it will be necessary to combine dice obtained from various sources on a single substrate. Such dice may have differing interconnection techniques. As part of ARPA's program for application-specific electronic modules, we have designed and built a thin film substrate that incorporates (solder) flip chip, wirebond, TAB and discrete components. In this abstract, we describe the unique interconnection aspects of the module. This includes the use of lasersonic bonding (LSB) to attach a fine (outer lead bond) pitch TAB die, a simultaneous wire microconnection technique that allows customizing the function of certain features on the module, and a top surface metallurgy compatible with the three most common interconnection technologies.
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