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引用次数: 45
摘要
非易失性存储器(NVM)在半导体市场上扮演着重要的角色,特别是主要用于手机和其他类型的电子便携式设备的闪存。在未来几年,便携式系统将需要更多的NVM,这些NVM具有高密度和非常高的写入吞吐量,用于数据存储应用程序,或者具有用于代码执行的快速随机访问。闪存自上世纪80年代末问世以来,一直遵循半导体地图的缩放进化,但随着一些基本物理限制的接近,进一步的缩放变得越来越复杂。虽然对浮栅技术的持续研究将在本十年末扩展当前闪存技术的能力,但人们对新的存储器存储机制和材料的兴趣越来越大,这些机制和材料有望至少在下一个十年末实现规模扩展。在不同的基于浮动门概念替代存储机制的NVM中,相变存储器(PCM),也称为电子统一存储器(OUM),是最有前途的候选之一,与闪存相比,具有提高性能的潜力,并且可以超越闪存技术(Lai和Lowrey (2001), Lai (2003), Bez(2004))。在本文中,首先介绍了相变存储器的物理和操作。接着讨论了目前的发展现状。最后,该技术缺乏规模化能力
Current status of chalcogenide phase change memory
Non-volatile memories (NVM) are playing an important role in the semiconductor market, thanks in particular to flash which is used mainly in cellular phones and other types of electronic portable equipment. In the coming years portable systems will demand even more NVM with high density and very high writing throughput for data storage application, or with fast random access for code execution. Flash memory has followed the scaling evolution, of the semiconductor map since its introduction in the late '80's but further scaling is becoming increasingly complex as some of the fundamental physical limitations are being approached. While continued research on floating gate techniques should extend the current flash technology capability through the end of this decade, there is increasing interest in new memory storage mechanisms and materials that have promise for scaling through at least the end of the next decade. Among the different NVM based on storage mechanisms alternative to the floating gate concept, phase-change memories (PCM), also called ovionic unified memory (OUM),is one of the most promising candidates, having the potential to improve the performance compared to flash as well as to be scalable beyond flash technology (Lai and Lowrey (2001), Lai (2003), Bez (2004)), In this review, the physics and operation of phase change memory is first presented, followed by discussion of current status of development. Finally, the scaling capability of the technology is absent