A Shape Memory Alloy 1×2 Optical Waveguide Switch

This paper presents design, fabrication and characterization of a novel integrated optical waveguide switch that allows for coupling of an input port in either of two output ports. A new fabrication process has been developed to integrate a shape memory alloy (SMA) bimorph nanoactuator with a footprint below 5 $\mu \mathrm{m}^{2}$ on a silicon photonic chip. Optical measurements demonstrate a decrease in power transfer by 53 % for a decrease in gap size from 250 nm to 200 nm at a wavelength of 1300 nm, which is in line with FEM-based simulations. The simulations further indicate that a decrease in power transfer by 100% occurs at a gap size of 170 nm.