用压响应扫描力显微镜研究外延式Pb(Zr,Ti)O/sub 3/薄膜电容器的畴运动

H. Fujisawa, T. Yagi, M. Shimizu, H. Niu
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引用次数: 0

摘要

采用压电响应扫描力显微镜(PFM)和开关电流测量研究了外延型Pb(Zr,Ti)O/sub 3/薄膜电容器中的畴运动。PFM观察显示,当开关脉冲宽度从80 ns增加到200ns时,开关区域的扫描面积从8%增加到92%。利用PFM系统内置的电阻负载电路成功地测量了开关电流。当开关脉冲宽度小于开关时间(/spl sim/250ns)时,开关电流瞬态后缘的快速下降表明,在去除外部电压时,畴运动立即冻结。因此,可以认为切换宽度小于切换时间的脉冲后得到的PFM图像显示了极化切换期间的瞬态畴结构。通过PFM观测得到Ishibashi理论的形状指数和开关时间分别为3.6和165ns,开关电流测量得到2.5和180ns。
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Domain motions in epitaxial Pb(Zr,Ti)O/sub 3/ thin film capacitors by piezoresponse scanning force microscopy
Domain motions in epitaxial Pb(Zr,Ti)O/sub 3/ thin film capacitors were investigated by piezoresponse scanning force microscopy (PFM) and switching current measurements. PFM observations revealed that switched domains increased from 8 to 92% of the scanning area as the switching pulse width increased from 80 to 200ns. Switching currents were successfully measured using a resistance load circuit built in the PFM system. Rapid drop at the trailing edge of switching current transients suggests that domain motions immediately froze at the removal of the external voltage when the switching pulse width was shorter than the switching time (/spl sim/250ns). Therefore, it can be considered that PFM images obtained after switching pulses with a shorter width than the switching time revealed transient domain structures during the polarization switching period. The shape index and switching time of the Ishibashi theory can be obtained as 3.6 and 165ns from PFM observations and 2.5 and 180ns from switching current measurements, respectively.
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