基于泄漏准模的高灵敏度非对称波导光学传感器蔗糖浓度检测研究

Aradhana Dutta, B. Deka, P. Sahu
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摘要

本文提出了一种基于泄漏准模数学模型的高灵敏度非对称平面波导光学传感器,用于测量蔗糖水溶液浓度的微小变化。平面波导传感器采用氧氮化硅(SiON)基材料,采用等离子体增强化学气相沉积(PECVD)和反应离子蚀刻(RIE)技术等标准制造工艺制作而成。利用基于正弦模的简单有效折射率法(SEIM)估计了波导几何形状TE模的基模传播常数。该技术基于倏逝波传感(EWS)方案,诱导有效的折射率变化。该传感器的优点是简单、灵敏度高、筛选潜力大,在不久的将来可用于在线监测血糖水平。该波导的灵敏度是现有平面波导传感器的10倍以上,实验结果与理论结果吻合较好。
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Study on highly sensitive asymmetric waveguide optical sensor for detection of sucrose concentration based on leaky quasi-modes
The development of a highly sensitive asymmetric planar waveguide optical sensor based on a mathematical model using leaky quasi-modes in an endeavor to measure slight changes of aqueous sucrose concentration is presented in this paper. The planar waveguide sensor has been fabricated using Silicon Oxynitride (SiON) based material with standard fabrication process such as Plasma Enhanced Chemical Vapor Deposition (PECVD) and Reactive Ion Etching (RIE) techniques. The propagation constant of fundamental modes for TE mode of the waveguide geometry have been estimated using Simple Effective Index Method (SEIM) based on sinusoidal modes. The technique is based on Evanescent Wave Sensing (EWS) scheme, inducing an effective refractive index change. The merits of this sensor are simplicity, highly sensitivity, screening the potential that it can be used for online monitoring of blood glucose levels in the near future. The sensitivity of the waveguide is ~10 times more than that of the previously reported work on planar waveguide sensors and the results obtained experimentally matches well with the obtained theoretical result.
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