利用二维自洽蒙特卡罗方法优化异质结垂直场效应晶体管的设计

S. Weinzierl, J. Krusius
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引用次数: 1

摘要

对异质结垂直场效应晶体管(VFET)稳态和瞬态工作的大量蒙特卡罗模拟表明,器件的测量截止频率与预测截止频率之间的差异有两个原因。首先,横向栅极放置实验表明,制备的器件没有经过高速性能优化。此外,由于本研究中器件的运行受热载流子输运和多维空间电荷效应的支配,因此先前未考虑这些现象的预测是不现实的。描述了用于验证仿真方法准确性的装置的结构和特点。为了理解蒙特卡罗结果,提出了一个考虑局部电流连续性和空间电荷的简单概念模型。
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Optimization of the design of the heterojunction vertical field effect transistor using a two-dimensional self-consistent Monte Carlo method
Extensive Monte Carlo simulations of both steady-state and transient operation of a heterojunction vertical field-effect transistor (VFET) show that the discrepancy between measured and predicted cutoff frequencies for the device has two causes. First, experiments with lateral gate placement show that fabricated devices have not been optimized for high-speed performance. In addition, it is shown that because the operation of the devices in this study was governed by hot carrier transport and multidimensional space charge effects, previous predictions which did not take these phenomena into account are unrealistic. The structure and characteristics of the device used to verify the accuracy of the simulation method are described. A simple conceptual model which considers both local current continuity and space charges is presented for understanding the Monte Carlo results.<>
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