石墨烯场效应晶体管采用化学气相沉积法在Co薄膜上生长大面积单层石墨烯

M. Ramón, A. Gupta, C. Corbet, D. Ferrer, H. Movva, G. Carpenter, L. Colombo, G. Bourianoff, M. Doczy, D. Akinwande, E. Tutuc, S. Banerjee
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引用次数: 2

摘要

人们对合成高质量、大面积石墨烯薄膜的方法非常感兴趣,因为这是电子工业实际应用所必需的。特别是,化学气相沉积(CVD)方法的最新发展表明,通过催化CVD生长在金属衬底上生长大面积石墨烯是一种很有前途的方法[1]。在Cu和Ni上生长CVD的报道很常见[1-3];然而,在Co上生长石墨烯的努力很少[4],并且在Co/SiO2/Si上生长石墨烯的尝试导致了非常小的以多层石墨烯为主的区域,不适合晶体管制造。与Ni不同,Co由于低晶格失配而具有吸引力(<Co(0001)和Co(0001)表面之间的差异为2%,Co与Si的相容性优于Cu,这是Si的深阱和快速扩散器。在这里,我们展示了石墨烯场效应晶体管(gfet)是用Co薄膜上催化CVD生长的大面积单层石墨烯制备的。
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Graphene field-effect transistors using large-area monolayer graphene grown by chemical vapor deposition on Co thin films
There has been great interest in methods for the synthesis of high-quality, large-area graphene films, as required for practical applications in the electronics industry. In particular, recent developments in chemical vapor deposition (CVD) methods have shown a promising approach to grow large-area graphene on metal substrates by catalyzed CVD growth [1]. Reports of CVD growth on Cu and Ni are common [1–3]; however, there have been few efforts to grow graphene on Co [4], and attempts to grow graphene on Co/SiO2/Si resulted in very small domains of predominantly multilayer graphene that were not suitable for transistor fabrication. Unlike Ni, Co is attractive due to the low lattice mismatch (< 2%) between graphene and the Co (0001) surface, and Co exhibits greater compatibility with Si than Cu, which is a deep trap in Si and a fast diffuser. Here we have demonstrated graphene field-effect transistors (GFETs) fabricated using large-area monolayer graphene grown by catalyzed CVD on Co films.
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