在SiO2/Si和Si衬底上生长的Pd-C薄膜

CAS 2010 Proceedings (International Semiconductor Conference) Pub Date : 2010-12-03 DOI:10.1109/SMICND.2010.5649088

R. Diduszko, E. Czerwosz, E. Kowalska, M. Kozłowski, R. Nietubyć, F. Craciunoiu, M. Danila

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摘要

本文介绍了在纯硅和氧化硅衬底上用两步法制备的钯碳纳米结构薄膜的SEM、XRD和EXAFS研究结果。在这些衬底上沉积的薄膜在结构、地形和形态上存在差异。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Pd-C film growN ON SiO2/Si and Si substrates

In this paper we present results of SEM, XRD and EXAFS studies of palladium-carbon nanostructural films prepared in two-steps method on pure and oxidized silicon substrates. Structural, topographical and morphological differences were found between films deposited on those substrates.

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CAS 2010 Proceedings (International Semiconductor Conference)

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