大功率激光二极管的散热与封装设计

C.C. Lee, D. H. Chien
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引用次数: 11

摘要

对大功率激光二极管进行了散热和封装设计。研究了连接和倒装两种结构。倒装芯片技术远远优于连接方法。对于一个300 μ m(L)*500 μ m(W)有源区域为300 μ m(L)*5 μ m(W)的GaAs激光二极管芯片,采用金刚石散热器的倒装设计,热阻为30.14℃/W,采用铜钨散热器的倒装设计,热阻为41.72℃/W。计算结果表明,在热流均匀的情况下,沿活动区的温度是均匀的。因此,建议激光芯片沿着有源区设计均匀的热流密度,而不是均匀的电流密度。提出了一种技术,可以在不产生焊料进入激光切面的危险的情况下对激光芯片进行倒装键合。
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Thermal and package design of high power laser diodes
Thermal and package design is carried out for high power laser diodes. Both junction-up and flip-chip configurations are studied. The flip-chip technique is far superior to the junction-up method. For a 300- mu m(L)*500- mu m(W) GaAs laser diode chip with active region of 300 mu m(L)*5 mu m(W), the flip-chip design gives a thermal resistance of 30.14 degrees C/W using a diamond heat sink, and 41.72 degrees C/W using a copper-tungsten heat sink. Calculated result shows that the temperature along the active region is uniform for uniform heat flux. It is thus recommended that the laser chip be designed with uniform heat flux rather than uniform current density along the active region. A technology is suggested to perform flip-chip bonding of the laser chip without incurring the danger of solder getting onto the laser facets.<>
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