自动三维金相系统的开发及其在显微组织分析中的初步应用

A. Lemiasheuski, E. Bajer, G. Oder, A. Göbel, R. Hesse, A. Pfennig, D. Bettge
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引用次数: 0

摘要

传统的金相学依赖于单个断面的成像。然而,关于空间形状和微观结构安排的结论只能在有限的程度上得出。因此,从金相连续剖面重建三维显微结构的想法是显而易见的,而且一点也不新鲜。然而,手工准备大量单独的部分并将它们组装成图像堆栈的过程既耗时又费力,因此构成了经常使用的障碍。这就是为什么德国联邦材料研究与测试研究所(简称BAM)正在开发一种机器人辅助的3D金相系统,该系统可以自动重复地完成金相切片的准备和图像采集任务。制备包括研磨、抛光和可选的截面表面蚀刻。图像采集是使用光学显微镜进行自动聚焦在几个放大水平。然后对获得的图像堆栈进行预处理,分割并转换为类似于显微层析图像的3D模型,但在大体积下具有更高的横向分辨率。与层析成像技术相反,可以执行传统的化学蚀刻来进行对比。扫描电子显微镜的集成正处于计划阶段。迄今为止进行的研究已经证明了可视化热气体腐蚀层、灰铸铁和陶瓷微电子结构(过孔)的可能性。
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Development of an automated 3D metallography system and some first application examples in microstructural analysis
Abstract Traditional metallography relies on the imaging of individual section planes. However, conclusions as to spatial shapes and microstructural arrangements can only be drawn to a limited extent. The idea to reconstruct three-dimensional microstructures from metallographic serial sections is therefore obvious and not at all new. However, the manual process of preparing a great number of individual sections and assembling them into image stacks is time-consuming and laborious and therefore constitutes an obstacle to frequent use. This is why the Federal Institute for Materials Research and Testing, or BAM for short ( Bundesanstalt für Materialforschung und -prüfung ), is developing a robot-assisted 3D metallography system performing the tasks of preparation and image acquisition on a metallographic section fully automatically and repeatedly. Preparation includes grinding, polishing and optional etching of the section surface. Image acquisition is performed using a light optical microscope with autofocus at several magnification levels. The obtained image stack is then pre-processed, segmented and converted to a 3D model resembling a microtomographic image, but with a higher lateral resolution at large volumes. As opposed to tomographic techniques, it is possible to perform traditional chemical etching for contrasting. The integration of a scanning electron microscope is in the planning stages. Studies conducted so far have demonstrated the possibility of visualizing hot gas corrosion layers, gray cast irons and ceramic-based microelectronic structures (vias).
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