{"title":"利用248nm准分子激光在玻璃基板上形成高生产率微孔的微结构","authors":"","doi":"10.2961/jlmn.2023.02.2005","DOIUrl":null,"url":null,"abstract":"High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy.","PeriodicalId":54788,"journal":{"name":"Journal of Laser Micro Nanoengineering","volume":"22 1","pages":"0"},"PeriodicalIF":0.8000,"publicationDate":"2023-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microstructure Formation on Glass Substrates for High-productivity Fabrication of Micro-vias Using 248 nm Excimer Laser\",\"authors\":\"\",\"doi\":\"10.2961/jlmn.2023.02.2005\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy.\",\"PeriodicalId\":54788,\"journal\":{\"name\":\"Journal of Laser Micro Nanoengineering\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.8000,\"publicationDate\":\"2023-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Laser Micro Nanoengineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2961/jlmn.2023.02.2005\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Laser Micro Nanoengineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2961/jlmn.2023.02.2005","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Microstructure Formation on Glass Substrates for High-productivity Fabrication of Micro-vias Using 248 nm Excimer Laser
High-productivity fabrication of micro-vias in glass substrates is required for post-5G high-frequency signal interposers. This paper describes the fabrication of high-quality micro-vias with a high aspect ratio by ablation using a 248 nm excimer laser. To clarify the details of the ablation process, we investigate the surface microstructure generated by excimer laser irradiation. The results indicate that laser irradiation produces a surface microstructure that enhances the absorption of laser energy.
期刊介绍:
Journal of Laser Micro/Nanoengineering, founded in 2005 by Japan Laser Processing Society (JLPS), is an international online journal for the rapid publication of experimental and theoretical investigations in laser-based technology for micro- and nano-engineering. Access to the full article is provided free of charge.
JLMN publishes regular articles, technical communications, and invited papers about new results related to laser-based technology for micro and nano engineering. The articles oriented to dominantly technical or industrial developments containing interesting and useful information may be considered as technical communications.