H, D, T原子溅射多晶铍的模拟

None Babenko P. Yu., None Mikhailov V. S., None Shergin A. P., None Zinoviev A. N.
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摘要

本文给出了用氢同位素模拟多晶铍在8 eV-100 keV碰撞能量范围内溅射系数的结果,以及溅射系数与入射光束入射表面角度的关系。这一数据对于估计由铍制成的ITER托卡马克第一壁的溅射是必要的。结果表明,表面形状对所得结果有很强的影响。考虑了平面势垒(光滑表面)和球形势垒(由尖峰组成的表面)的极限情况。建立了碰撞级联对溅射系数的影响。得到了不同射束入射角度下溅射粒子平均形成深度与轰击粒子能量的关系。计算了不同能量的轰击束原子对溅射粒子喷射的能谱和角依赖关系。结果表明,在小掠射角下,入射粒子表面势阱的存在改变了溅射系数对入射角的依赖。关键词:溅射系数,溅射粒子的能量和角分布,原子间势,氢同位素,铍。
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Simulation of polycrystalline beryllium sputtering by H, D, T atoms
The results of modeling the sputtering coefficients of polycrystalline beryllium by hydrogen isotopes in the range of collision energies of 8 eV-100 keV and their dependences on the angle of incidence of the beam on the surface are presented. This data is necessary for estimating the sputtering of the first wall in the ITER tokamak made from beryllium. A strong surface shape influence on obtained results is shown. The limiting cases of a flat potential barrier (smooth surface) and a spherical potential barrier (a surface consisting of spikes) are considered. The effect of collision cascades on the sputtering coefficient has been established. The dependences of the average depth of sputtered particle formation on the bombarding particles energy are obtained for various angles of beam incidence on the target. The energy spectra and angular dependences of the ejection of sputtered particles are calculated for different energies of bombarding beam atoms. It is shown that the presence of an attractive well in the potential of an incident particle surface changes the sputtering coefficient dependence on incidence angle at small glancing angles. Keywords: Sputtering coefficients, energy and angular distributions of sputtered particles, interatomic potential, hydrogen isotopes, beryllium.
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