DongJun Jang, U-Jin Cho, Youhyeong Jeon, TaeYong Lee, RyangHa Kim, Younglae Kim, Min-Woo Kwon
{"title":"基于二维钯纳米粒子修饰二硫化钼的电阻式氢探测传感器","authors":"DongJun Jang, U-Jin Cho, Youhyeong Jeon, TaeYong Lee, RyangHa Kim, Younglae Kim, Min-Woo Kwon","doi":"10.5573/jsts.2023.23.5.258","DOIUrl":null,"url":null,"abstract":"This research presents a resistive-type hydrogen (HSUB2/SUB) gas sensor based on a composite of palladium nanoparticles (Pd-NP) decorated on 2Dmolybdenum disulfide (MoS2) layer. The sensor fabrication involves synthesizing MoSSUB2/SUB and coating Pd by DC sputtering technique. MoS2 has been adopted for its high selectivity for H2, wide operating temperature range, reliability, and low power consumption. Pd has high catalytic properties for HSUB2/SUB and performs a HSUB2/SUB adsorption mechanism through resistance transition. In this study, we propose a Pddecorated MoS2 structure and introduce the chemical resistance mechanism within the channel. The limit of detection (LOD), sensitivity and response time of the fabricated HSUB2/SUB gas sensors are optimized and analyzed. Finally, the nanocomposites network based HSUB2/SUB sensor can promote the utilization of various industries and discuss the issues in sensor applications.","PeriodicalId":17067,"journal":{"name":"Journal of Semiconductor Technology and Science","volume":"161 ","pages":"0"},"PeriodicalIF":0.5000,"publicationDate":"2023-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Resistive Hydrogen Detection Sensors based on 2 Dimensions – Molybdenum Disulfide Decorated by Palladium Nanoparticles\",\"authors\":\"DongJun Jang, U-Jin Cho, Youhyeong Jeon, TaeYong Lee, RyangHa Kim, Younglae Kim, Min-Woo Kwon\",\"doi\":\"10.5573/jsts.2023.23.5.258\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This research presents a resistive-type hydrogen (HSUB2/SUB) gas sensor based on a composite of palladium nanoparticles (Pd-NP) decorated on 2Dmolybdenum disulfide (MoS2) layer. The sensor fabrication involves synthesizing MoSSUB2/SUB and coating Pd by DC sputtering technique. MoS2 has been adopted for its high selectivity for H2, wide operating temperature range, reliability, and low power consumption. Pd has high catalytic properties for HSUB2/SUB and performs a HSUB2/SUB adsorption mechanism through resistance transition. In this study, we propose a Pddecorated MoS2 structure and introduce the chemical resistance mechanism within the channel. The limit of detection (LOD), sensitivity and response time of the fabricated HSUB2/SUB gas sensors are optimized and analyzed. Finally, the nanocomposites network based HSUB2/SUB sensor can promote the utilization of various industries and discuss the issues in sensor applications.\",\"PeriodicalId\":17067,\"journal\":{\"name\":\"Journal of Semiconductor Technology and Science\",\"volume\":\"161 \",\"pages\":\"0\"},\"PeriodicalIF\":0.5000,\"publicationDate\":\"2023-10-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Semiconductor Technology and Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5573/jsts.2023.23.5.258\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Semiconductor Technology and Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5573/jsts.2023.23.5.258","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Resistive Hydrogen Detection Sensors based on 2 Dimensions – Molybdenum Disulfide Decorated by Palladium Nanoparticles
This research presents a resistive-type hydrogen (HSUB2/SUB) gas sensor based on a composite of palladium nanoparticles (Pd-NP) decorated on 2Dmolybdenum disulfide (MoS2) layer. The sensor fabrication involves synthesizing MoSSUB2/SUB and coating Pd by DC sputtering technique. MoS2 has been adopted for its high selectivity for H2, wide operating temperature range, reliability, and low power consumption. Pd has high catalytic properties for HSUB2/SUB and performs a HSUB2/SUB adsorption mechanism through resistance transition. In this study, we propose a Pddecorated MoS2 structure and introduce the chemical resistance mechanism within the channel. The limit of detection (LOD), sensitivity and response time of the fabricated HSUB2/SUB gas sensors are optimized and analyzed. Finally, the nanocomposites network based HSUB2/SUB sensor can promote the utilization of various industries and discuss the issues in sensor applications.
期刊介绍：
Journal of Semiconductor Technology and Science is published to provide a forum for R&D people involved in every aspect of the integrated circuit technology, i.e., VLSI fabrication process technology, VLSI device technology, VLSI circuit design and other novel applications of this mass production technology. When IC was invented, these people worked together in one place. However, as the field of IC expanded, our individual knowledge became narrower, creating different branches in the technical society, which has made it more difficult to communicate as a whole. The fisherman, however, always knows that he can capture more fish at the border where warm and cold-water meet. Thus, we decided to go backwards gathering people involved in all VLSI technology in one place.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
