{"title":"北京大学小型化2.45 GHz ECR等离子射流炮的改进","authors":"Bujian Cui, Shixiang Peng, Wenbin Wu, Tenghao Ma, Yaoxiang Jiang, Zhiyu Guo, Jiaer Chen","doi":"10.1088/1748-0221/18/10/p10038","DOIUrl":null,"url":null,"abstract":"Abstract In an ion implanter, plasma flood gun (PFG) is used to provide electrons to neutralize the accumulated charge on the wafer surface to avoid breakdown damage. With the development of ion implantation technology, four key requirements have been put forward for PFG. They are simple structure, plasma with high density and low electron temperature, no metal contamination and long life. The existing PFG, such as the filament type PFG, can hardly meet the above requirements at the same time. 2.45 GHz ECR ion source with the advantages of high beam density, high stability, long life time and no filament metal contamination, has shown great potential to work as PFG. Recently, a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance PFG (PMECR-PFG) has been developed at Peking University (PKU). In our previous test, 8.8 mA electron extraction current was obtained with argon gas. In this work, by optimizing the magnetic field configuration to a resonant configuration, the performance of this ECR-PFG was greatly improved. With 100 W microwave power, an 80 mA electron current load was obtained under the extraction voltage of 0.1 kV. To minimize the metal contamination, a three-slit graphite plasma electrode was fabricated and a 50 mA load was generated at only 30 W RF power. During all tests, the gas consumption rate is lower than 0.6 sccm, which is beneficial to maintain the vacuum of implanter beamline.","PeriodicalId":16184,"journal":{"name":"Journal of Instrumentation","volume":"25 1","pages":"0"},"PeriodicalIF":1.3000,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improvement of miniaturized 2.45 GHz ECR plasma flood gun at PKU\",\"authors\":\"Bujian Cui, Shixiang Peng, Wenbin Wu, Tenghao Ma, Yaoxiang Jiang, Zhiyu Guo, Jiaer Chen\",\"doi\":\"10.1088/1748-0221/18/10/p10038\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract In an ion implanter, plasma flood gun (PFG) is used to provide electrons to neutralize the accumulated charge on the wafer surface to avoid breakdown damage. With the development of ion implantation technology, four key requirements have been put forward for PFG. They are simple structure, plasma with high density and low electron temperature, no metal contamination and long life. The existing PFG, such as the filament type PFG, can hardly meet the above requirements at the same time. 2.45 GHz ECR ion source with the advantages of high beam density, high stability, long life time and no filament metal contamination, has shown great potential to work as PFG. Recently, a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance PFG (PMECR-PFG) has been developed at Peking University (PKU). In our previous test, 8.8 mA electron extraction current was obtained with argon gas. In this work, by optimizing the magnetic field configuration to a resonant configuration, the performance of this ECR-PFG was greatly improved. With 100 W microwave power, an 80 mA electron current load was obtained under the extraction voltage of 0.1 kV. To minimize the metal contamination, a three-slit graphite plasma electrode was fabricated and a 50 mA load was generated at only 30 W RF power. During all tests, the gas consumption rate is lower than 0.6 sccm, which is beneficial to maintain the vacuum of implanter beamline.\",\"PeriodicalId\":16184,\"journal\":{\"name\":\"Journal of Instrumentation\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2023-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Instrumentation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1748-0221/18/10/p10038\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1748-0221/18/10/p10038","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Improvement of miniaturized 2.45 GHz ECR plasma flood gun at PKU
Abstract In an ion implanter, plasma flood gun (PFG) is used to provide electrons to neutralize the accumulated charge on the wafer surface to avoid breakdown damage. With the development of ion implantation technology, four key requirements have been put forward for PFG. They are simple structure, plasma with high density and low electron temperature, no metal contamination and long life. The existing PFG, such as the filament type PFG, can hardly meet the above requirements at the same time. 2.45 GHz ECR ion source with the advantages of high beam density, high stability, long life time and no filament metal contamination, has shown great potential to work as PFG. Recently, a miniaturized 2.45 GHz permanent magnet electron cyclotron resonance PFG (PMECR-PFG) has been developed at Peking University (PKU). In our previous test, 8.8 mA electron extraction current was obtained with argon gas. In this work, by optimizing the magnetic field configuration to a resonant configuration, the performance of this ECR-PFG was greatly improved. With 100 W microwave power, an 80 mA electron current load was obtained under the extraction voltage of 0.1 kV. To minimize the metal contamination, a three-slit graphite plasma electrode was fabricated and a 50 mA load was generated at only 30 W RF power. During all tests, the gas consumption rate is lower than 0.6 sccm, which is beneficial to maintain the vacuum of implanter beamline.
期刊介绍:
Journal of Instrumentation (JINST) covers major areas related to concepts and instrumentation in detector physics, accelerator science and associated experimental methods and techniques, theory, modelling and simulations. The main subject areas include.
-Accelerators: concepts, modelling, simulations and sources-
Instrumentation and hardware for accelerators: particles, synchrotron radiation, neutrons-
Detector physics: concepts, processes, methods, modelling and simulations-
Detectors, apparatus and methods for particle, astroparticle, nuclear, atomic, and molecular physics-
Instrumentation and methods for plasma research-
Methods and apparatus for astronomy and astrophysics-
Detectors, methods and apparatus for biomedical applications, life sciences and material research-
Instrumentation and techniques for medical imaging, diagnostics and therapy-
Instrumentation and techniques for dosimetry, monitoring and radiation damage-
Detectors, instrumentation and methods for non-destructive tests (NDT)-
Detector readout concepts, electronics and data acquisition methods-
Algorithms, software and data reduction methods-
Materials and associated technologies, etc.-
Engineering and technical issues.
JINST also includes a section dedicated to technical reports and instrumentation theses.