超薄光学涂层耐磨表面着色

IF 15.7 Q1 OPTICS PhotoniX Pub Date : 2022-06-28 DOI:10.1186/s43074-022-00061-5
Geng, Jiao, Shi, Liping, Ni, Junhuan, Jia, Qiannan, Yan, Wei, Qiu, Min
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引用次数: 5

摘要

我们在各种衬底上设计、制造、光学和机械表征可穿戴超薄涂层,包括蓝宝石、玻璃和硅片。采用极硬陶瓷材料氮化钛(TiN)、氮化铝(AlN)和氮化铝钛(TiAlN)分别作为反射层、隔离层和吸收层。两种类型的涂层已经被证明。首先,我们在各种衬底(TiAlN-TiN,总厚度<100 nm)上沉积TiAlN后镀TiN,获得生动且与视角无关的表面颜色。颜色可以通过改变TiAlN层的厚度来调节。通过划痕试验验证了彩色超薄光学涂层的耐磨性。常用的Si / ge金属基板表面着色的莫氏硬度<2.5,软如指甲。然而,我们在衬底上的TiAlN-TiN的莫氏硬度评估为7-9,比石英硬。其次,通过在透明衬底上依次涂覆TiAlN-TiN-AlN-TiN(总厚度为130 nm的四层薄膜),获得了与分束滤光片具有相同透射和反射颜色的fano -谐振光学涂层(FROC)。FROC涂层像玻璃一样坚硬。这种可穿戴和颜色可调的薄膜结构颜色和滤光片可能对许多实际应用具有吸引力,例如太阳镜。
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Wear-resistant surface coloring by ultrathin optical coatings
We design, fabricate, optically and mechanically characterize wearable ultrathin coatings on various substrates, including sapphire, glass and silicon wafer. Extremely hard ceramic materials titanium nitride (TiN), aluminium nitride (AlN), and titanium aluminium nitride (TiAlN) are employed as reflective, isolated and absorptive coating layer, respectively. Two types of coatings have been demonstrated. First, we deposit TiAlN after TiN on various substrates (TiAlN-TiN, total thicknesses <100 nm), achieving vivid and viewing-angle independent surface colors. The colors can be tuned by varying the thickness of TiAlN layer. The wear resistance of the colorful ultrathin optical coatings is verified by scratch tests. The Mohs hardness of commonly used surface coloring made of Si-/Ge-metals on substrates is <2.5, as soft as fingernail. However, the Mohs hardness of our TiAlN-TiN on substrates is evaulated to be 7-9, harder than quartz. Second, Fano-resonant optical coating (FROC), which can transmit and reflect the same color as a beam split filter is also obtained by successively coating TiAlN-TiN-AlN-TiN (four-layer film with a total thickness of 130 nm) on transparent substrates. The FROC coating is as hard as glass. Such wearable and color-tunable thin-film structural colors and filters may be attractive for many practical applications such as sunglasses.
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来源期刊
CiteScore
25.70
自引率
0.00%
发文量
0
审稿时长
13 weeks
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