应用多曝光衍射图样融合技术,利用直接电子探测器实现更广角的透射菊池衍射

IF 2.1 3区 工程技术 Q2 MICROSCOPY Ultramicroscopy Pub Date : 2023-12-07 DOI:10.1016/j.ultramic.2023.113902
Tianbi Zhang, T.Ben Britton
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引用次数: 0

摘要

衍射图样分析可用于揭示材料的晶体结构,这些信息可用于先进工程材料的纳米和微观结构,从而为现代生活提供便利。对于纳米结构材料,衍射图样分析通常在透射电子显微镜(TEM)中进行,而 TEM 衍射图样由于相机长度较长,角度范围通常有限(小于几度),这就需要分析多个图样来探测一个单元晶胞。另一种方法是使用扫描电子显微镜(SEM)中的轴向探测器捕捉广角菊池衍射图样,相机长度较短。这些 "透射菊地衍射"(TKD)图案是单胞的直接投影,可以使用基于 EBSD 的方法和动态衍射理论进行常规分析。在本研究中,我们大大加强了这种分析,并提出了一种多曝光衍射图样融合方法,该方法提高了使用基于 Timepix3 的直接电子探测器(DED)捕获的检测图样的动态范围。该方法采用易于应用的曝光融合程序来收集数据,扩大动态范围,并对这些角度非常宽(95°)的图案中的强度分布进行归一化处理。通过全衍射球再投影演示了这种方法的潜力,并强调了这种方法在扫描电子显微镜中快速探测纳米结构材料结构的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Multi-exposure diffraction pattern fusion applied to enable wider-angle transmission Kikuchi diffraction with direct electron detectors

Diffraction pattern analysis can be used to reveal the crystalline structure of materials, and this information is used to nano- and micro-structure of advanced engineering materials that enable modern life. For nano-structured materials typically diffraction pattern analysis is performed in the transmission electron microscope (TEM) and TEM diffraction patterns typically have a limited angular range (less than a few degrees) due to the long camera length, and this requires analysis of multiple patterns to probe a unit cell. As a different approach, wide angle Kikuchi patterns can be captured using an on-axis detector in the scanning electron microscope (SEM) with a shorter camera length. These ‘transmission Kikuchi diffraction’ (TKD) patterns present a direct projection of the unit cell and can be routinely analysed using EBSD-based methods and dynamical diffraction theory. In the present work, we enhance this analysis significantly and present a multi-exposure diffraction pattern fusion method that increases the dynamic range of the detected patterns captured with a Timepix3-based direct electron detector (DED). This method uses an easy-to-apply exposure fusion routine to collect data and extend the dynamic range, as well as normalise the intensity distribution within these very wide (>95°) angle patterns. The potential of this method is demonstrated with full diffraction sphere reprojection and highlight potential of the approach to rapidly probe the structure of nano-structured materials in the scanning electron microscope.

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来源期刊
Ultramicroscopy
Ultramicroscopy 工程技术-显微镜技术
CiteScore
4.60
自引率
13.60%
发文量
117
审稿时长
5.3 months
期刊介绍: Ultramicroscopy is an established journal that provides a forum for the publication of original research papers, invited reviews and rapid communications. The scope of Ultramicroscopy is to describe advances in instrumentation, methods and theory related to all modes of microscopical imaging, diffraction and spectroscopy in the life and physical sciences.
期刊最新文献
Exploring deep learning models for 4D-STEM-DPC data processing. Application of a novel local and automatic PCA algorithm for diffraction pattern denoising in TEM-ASTAR analysis in microelectronics. A simple and intuitive model for long-range 3D potential distributions of in-operando TEM-samples: Comparison with electron holographic tomography. EBSD and TKD analyses using inverted contrast Kikuchi diffraction patterns and alternative measurement geometries On the temporal transfer function in STEM imaging from finite detector response time
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