Chinese knot inspired isotropic linear scanning method for improved imaging performance in AFM

Abstract

Atomic force microscope (AFM) is an important nano-scale surface characterization and measurement method. Raster scanning method (RSM), widely used in AFMs, faces limitations on scanning speed and imaging accuracy. In this paper, an isotropic linear scanning method (ILSM) is proposed to improve the AFM imaging performance. Inspired by Chinese knot, ILSM is constructed by integrating two iterative triangular scanning trajectories in X and Y axes, similar to triangular Lissajous. Compared with the other scanning methods, ILSM features isotropic scanning trajectory across the scanning region. It is also easy to increase either the scanning speed or scanning resolution using ILSM. Subsequently, to address the hysteresis associated with the piezoelectric actuator, a new tracking algorithm is proposed by combining adaptive Kalman filtering and direct inverse modeling approach. Finally, AFM imaging experiments are conducted to validate the effectiveness of the proposed method. It can be found that the artifacts in RSM can be efficiently eliminated using the proposed method, thus improving the imaging quality.