利用回归分析和帕累托方差分析对铜电铸工艺的表面粗糙度参数进行研究和建模

Amir Masoud Behagh,  Alireza Fadaei Tehrani
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摘要

摘要本文研究了镀铜电铸工艺控制参数如施加电压、工艺时间、填料含量、硫酸铜浓度等对表面粗糙度的影响。为此,采用硫酸铜电铸浴建立了电铸装置。采用全因子法设计4个控制因子,每个控制因子为2个水平。每次实验结束后,用接触轮廓仪对制备的铜电铸样品进行表征,测量表面粗糙度参数,即平均粗糙度、均方根粗糙度、平均最大轮廓高度和自相关长度。最后,利用回归建模方法,根据实测数据建立预测模型。此外,对每个表面粗糙度参数进行Pareto方差分析,以评估控制因素的贡献率。结果表明,不同的表面粗糙度参数具有不同的控制因子。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Investigation and Modelling of Copper Electroforming Process for Surface Roughness Parameters Using Regression and Pareto ANOVA Analyses

The objective of this paper was to examine the effect of such deposited copper electroforming process control parameters as the applied voltage, the process time, the filler content, and the copper sulfate concentration on the surface roughness. For this purpose, an electroforming setup was made using a copper sulfate electroforming bath. A full factorial method was used to design the experiments with four control factors, each of them of two levels. After conducting each experiment, the prepared copper electroformed samples were characterized using a contact profilemeter and measuring certain surface roughness parameters, namely, the average roughness, the root mean square roughness, the average maximum height of the profile, and the autocorrelation length. Finally, the regression modelling was used to obtain a predictive model based on the measurements data. Also, the Pareto ANOVA analysis was performed for each surface roughness parameter to evaluate the contribution ratio of the control factors. The results demonstrated that a different control factor is dominant for each surface roughness parameter.

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来源期刊
Surface Engineering and Applied Electrochemistry
Surface Engineering and Applied Electrochemistry Engineering-Industrial and Manufacturing Engineering
CiteScore
1.60
自引率
22.20%
发文量
54
期刊介绍: Surface Engineering and Applied Electrochemistry is a journal that publishes original and review articles on theory and applications of electroerosion and electrochemical methods for the treatment of materials; physical and chemical methods for the preparation of macro-, micro-, and nanomaterials and their properties; electrical processes in engineering, chemistry, and methods for the processing of biological products and food; and application electromagnetic fields in biological systems.
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