S. O. Mihin, D. N. Egorov, O. N. Koshkur, A. E. Romanov
{"title":"基于微弧氧化和磁控溅射薄膜的吸附电容式湿度传感器的制造拓扑结构","authors":"S. O. Mihin, D. N. Egorov, O. N. Koshkur, A. E. Romanov","doi":"10.14489/td.2023.10.pp.038-048","DOIUrl":null,"url":null,"abstract":"The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.","PeriodicalId":432853,"journal":{"name":"Kontrol'. Diagnostika","volume":"14 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TOPOLOGY OF MANUFACTURING A SORPTION-CAPACITIVE HUMIDITY SENSOR BASED ON THIN FILMS OBTAINED BY MICROARC OXIDATION AND MAGNETRON SPUTTERING\",\"authors\":\"S. O. Mihin, D. N. Egorov, O. N. Koshkur, A. E. Romanov\",\"doi\":\"10.14489/td.2023.10.pp.038-048\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.\",\"PeriodicalId\":432853,\"journal\":{\"name\":\"Kontrol'. Diagnostika\",\"volume\":\"14 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Kontrol'. Diagnostika\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14489/td.2023.10.pp.038-048\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Kontrol'. Diagnostika","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14489/td.2023.10.pp.038-048","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
TOPOLOGY OF MANUFACTURING A SORPTION-CAPACITIVE HUMIDITY SENSOR BASED ON THIN FILMS OBTAINED BY MICROARC OXIDATION AND MAGNETRON SPUTTERING
The article describes the technological process of manufacturing a sorption-capacitive humidity sensor based on thin films of a sorbing moisture-sensitive layer implemented by microarc oxidation and a moisture-permeable electrode implemented by magnetron sputtering. The paper defines the technical requirements for the components of a sorption-capacitive humidity sensor. The electrical parameters of the moisture-sensitive layer are investigated depending on the component composition of the electrolyte and the modes of microarc oxidation. The geometrical parameters of the moisture-sensitive layer and the moisture-permeable electrode are presented, their structure and pore distribution are shown.
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