采用硅光子 MEMS 技术的芯片级中红外数字化计算光谱仪

IF 2.5 3区 物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Photonics and Nanostructures-Fundamentals and Applications Pub Date : 2024-02-01 DOI:10.1016/j.photonics.2024.101231
Haoyang Sun , Qifeng Qiao , Chengkuo Lee , Guangya Zhou
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引用次数: 0

摘要

由于对便携式光谱应用的需求日益增长,微型光谱仪正引起广泛关注。虽然利用硅光子学技术对芯片级光谱仪进行了广泛研究,但由于缺乏有效的可重构光子学方法,很少有研究涉及中红外(MIR)集成芯片级光谱仪的需求。在本文中,我们利用硅光子 MEMS 技术在中红外区域(3.6~5 μm 波长范围)提出了一种新颖的解决方案。我们采用了一种计算光谱测量方案,利用级联 MEMS 可调波导耦合器的数字化控制。MEMS 波导耦合器在数字开/关模式下工作,从而使该器件不受驱动电压波动的影响,并可用于片上场感应用。此外,还讨论了一种全面的数值分析方法,以系统地评估计算光谱仪的性能,包括其分辨率和工作带宽。作为概念验证,演示了由七个级联 MEMS 驱动波导耦合器实现的芯片级光谱仪。在 3.65 至 4.1 μm 波长范围内演示了稀疏光谱重建,双峰重建结果表明分辨率为 8 nm。此外,实验还表征了所提设备的响应时间和功耗。得益于良好的可扩展性,光谱分辨率可以通过增加波导耦合器级数得到进一步提高。随着中红外硅光子学的发展,所提出的工作有可能实现实验室芯片上的应用。© 2001 爱思唯尔科学。保留所有权利。
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Chip-scale mid-infrared digitalized computational spectrometer powered by silicon photonics MEMS technology

Miniaturized spectrometers are attracting widespread interest due to the rising demand for portable spectroscopic applications. While the chip-scale spectrometers are widely investigated using silicon photonics technology, few research have addressed the need for a mid-infrared (MIR) integrated chip-scale spectrometer due to the lack of an effective reconfigurable photonics approach. In this paper, we present a novel solution using silicon photonics MEMS technology in the MIR region (3.6–5 µm wavelength range). We adopt a computational spectrometry scheme using the digitalized control of cascaded MEMS-tunable waveguide couplers. The MEMS waveguide couplers are operated in digital on/off mode, thus making the device immune to driving voltage fluctuations and robust for on-chip field sensing applications. Moreover, a comprehensive numerical analysis method is discussed to systematically evaluate the performance of the computational spectrometer, including its resolution and operational bandwidth. As a proof-of-concept, a chip-scale spectrometer realized by seven cascaded MEMS-actuated waveguide coupler is demonstrated. The sparse spectral reconstruction is demonstrated in the wavelength range from 3.65 to 4.1 µm and the dual-peaks reconstruction results indicate a resolution of 8 nm. Besides, response time and power consumption of the proposed device are experimentally characterized. Benefitting from good scalability, the spectral resolution can be further improved by increasing the number of waveguide coupler stages. The proposed work has the potential to realize lab-on-a-chip applications with advances in MIR silicon photonics. © 2001 Elsevier Science. All rights reserved.

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来源期刊
CiteScore
5.00
自引率
3.70%
发文量
77
审稿时长
62 days
期刊介绍: This journal establishes a dedicated channel for physicists, material scientists, chemists, engineers and computer scientists who are interested in photonics and nanostructures, and especially in research related to photonic crystals, photonic band gaps and metamaterials. The Journal sheds light on the latest developments in this growing field of science that will see the emergence of faster telecommunications and ultimately computers that use light instead of electrons to connect components.
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