丝网印刷技术制备掺杂氧化钆的 Fe2O3-LaFeO3-La2O3 厚膜及其用于乙醇气体传感器的电学特性

‎. Agustina, Muhamad Taufik Ulhakim, A. Setiawan, D. G. Syarif, E. Suhendi
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摘要

最近,许多研究人员讨论了丝网印刷技术(SPT),认为这是制造气体传感器应用厚膜的一种好方法。本研究采用丝网印刷技术制备了掺杂氧化钆的 Fe2O3-LaFeO3-La2O3 厚膜,并将其应用于乙醇气体传感器。分别使用 X 射线衍射和扫描电子显微镜对晶体和形貌结构进行了研究。结果表明,掺杂氧化钆的 Fe2O3-LaFeO3-La2O3 晶体结构分为三相,即斜方晶系、正方晶系和六方晶系。形态结构显示平均粒径约为 0.61 微米。此外,为了确保厚膜在检测乙醇气体方面的性能,还对电学特性进行了测量。测量在约 310 ℃ 至 325 ℃ 的温度范围内进行,在各种乙醇气体含量(0 ppm、100 ppm、200 ppm 和 300 ppm)下进行。结果表明,在存在乙醇气体(300 ppm)的情况下,厚膜的最高响应为 427,最佳温度为 319 ∘C。这也证实了 SPT 是制造具有良好性能的气体传感器设备厚膜的绝佳方法。关键词: 制作、氧化钆、掺杂、厚膜、丝网印刷、电性能、乙醇、传感器
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Fabrication of Gadolinium Oxide-doped Fe2O3-LaFeO3-La2O3 Thick Films by Screen Printing Technique and Their Electrical Properties for Ethanol Gas Sensors
Recently, there have been many researchers who discussed screen printing techniques (SPT) as a good approach to fabricate the thick films for gas sensor applications. In this work, the SPTs were conducted to fabricate the thick films based on gadolinium oxide-doped Fe2O3-LaFeO3-La2O3 that were applied as ethanol gas sensors. The crystal and morphological structures were investigated using x-ray diffraction and scanning electron microscopy, respectively. It shows that there are three phases of the crystal structure of gadolinium oxide-doped Fe2O3-LaFeO3-La2O3 i.e., rhombohedral, orthorhombic, and hexagonal. The morphological structure shows an average particle size of about 0.61 μm. Furthermore, the electrical properties measurements were explored to ensure the performance of thick films in detecting the ethanol gases. Th measurements were conducted in the range of temperature of about 310 ∘C to 325 ∘C and in the various ethanol gas containing, it is 0 ppm, 100 ppm, 200 ppm, and 300 ppm. This result showed that the highest response of thick films in the existence of ethanol gases (300 ppm) is 427 with an optimum temperature of 319 ∘C. It is also confirmed that SPT has an excellent approach in thick film fabrication to produce gas sensor devices with good performance. Keywords: fabrication, gadolinium oxide, doped, thick films, screen printing, electrical properties, ethanol, sensors
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