{"title":"弱耦合硅谐振器馈通电容的分析与缓解","authors":"Man-Na Zhang;Rui Wang;Lei Dong;Li-Feng Wang;Qing-An Huang","doi":"10.1109/JSEN.2024.3390405","DOIUrl":null,"url":null,"abstract":"Weakly coupled silicon micromechanical resonators have been widely studied for sensors. However, parasitic feedthrough capacitances degrade the magnitude of output signals. This article presents a detailed investigation on the influence of the feedthrough capacitance, in particular, at low air pressures. It begins with a theoretical analysis and simulation using an equivalent circuit model to explore the impact of feedthrough capacitance on the output current of the coupled resonators. Experimental tests are conducted to illustrate the effects of feedthrough capacitance at different air pressures. The results reveal that resonators with lower quality factors are more susceptible to feedthrough influence. Using a half-frequency driving method, the feedthrough signal is effectively suppressed at low air pressures. The experiments show that it significantly suppresses the feedthrough level to -93 dB and achieves a 13 dB signal acquisition even under an air pressure of 120 Pa.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":null,"pages":null},"PeriodicalIF":4.3000,"publicationDate":"2024-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis and Mitigation of the Feedthrough Capacitance in Weakly Coupled Silicon Resonators\",\"authors\":\"Man-Na Zhang;Rui Wang;Lei Dong;Li-Feng Wang;Qing-An Huang\",\"doi\":\"10.1109/JSEN.2024.3390405\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Weakly coupled silicon micromechanical resonators have been widely studied for sensors. However, parasitic feedthrough capacitances degrade the magnitude of output signals. This article presents a detailed investigation on the influence of the feedthrough capacitance, in particular, at low air pressures. It begins with a theoretical analysis and simulation using an equivalent circuit model to explore the impact of feedthrough capacitance on the output current of the coupled resonators. Experimental tests are conducted to illustrate the effects of feedthrough capacitance at different air pressures. The results reveal that resonators with lower quality factors are more susceptible to feedthrough influence. Using a half-frequency driving method, the feedthrough signal is effectively suppressed at low air pressures. The experiments show that it significantly suppresses the feedthrough level to -93 dB and achieves a 13 dB signal acquisition even under an air pressure of 120 Pa.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2024-04-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10515208/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10515208/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
人们对用于传感器的弱耦合硅微机械谐振器进行了广泛研究。然而,寄生馈入电容会降低输出信号的幅度。本文详细研究了馈入电容的影响,特别是在低气压下的影响。文章首先使用等效电路模型进行理论分析和模拟,探讨馈通电容对耦合谐振器输出电流的影响。实验测试说明了不同气压下馈入电容的影响。结果表明,品质因数较低的谐振器更容易受到馈入电容的影响。使用半频驱动方法,可有效抑制低气压下的馈通电容信号。实验表明,即使在 120 Pa 的气压下,它也能将馈通电平显著抑制到 -93 dB,并实现 13 dB 的信号采集。
Analysis and Mitigation of the Feedthrough Capacitance in Weakly Coupled Silicon Resonators
Weakly coupled silicon micromechanical resonators have been widely studied for sensors. However, parasitic feedthrough capacitances degrade the magnitude of output signals. This article presents a detailed investigation on the influence of the feedthrough capacitance, in particular, at low air pressures. It begins with a theoretical analysis and simulation using an equivalent circuit model to explore the impact of feedthrough capacitance on the output current of the coupled resonators. Experimental tests are conducted to illustrate the effects of feedthrough capacitance at different air pressures. The results reveal that resonators with lower quality factors are more susceptible to feedthrough influence. Using a half-frequency driving method, the feedthrough signal is effectively suppressed at low air pressures. The experiments show that it significantly suppresses the feedthrough level to -93 dB and achieves a 13 dB signal acquisition even under an air pressure of 120 Pa.
期刊介绍:
The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following:
-Sensor Phenomenology, Modelling, and Evaluation
-Sensor Materials, Processing, and Fabrication
-Chemical and Gas Sensors
-Microfluidics and Biosensors
-Optical Sensors
-Physical Sensors: Temperature, Mechanical, Magnetic, and others
-Acoustic and Ultrasonic Sensors
-Sensor Packaging
-Sensor Networks
-Sensor Applications
-Sensor Systems: Signals, Processing, and Interfaces
-Actuators and Sensor Power Systems
-Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting
-Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data)
-Sensors in Industrial Practice