Detailed analysis of the capacitance characteristic measured using the pseudo-metal–oxide–semiconductor method

This paper discusses the capacitance–voltage (C–V) characteristics of a silicon-on-insulator (SOI) wafer obtained using the alternating current (AC) pseudo-metal–oxide–semiconductor (MOS) method. This study clarified that the C–V characteristics measured using the standard configuration of the AC pseudo-MOS method were strongly ruled by the condition of both the top and back contacts. Using a distinctive setup referred to as the Kelvin AC pseudo-MOS method, coupled with specific treatments applied to the wafer, we acquired C–V and impedance-related characteristics that differed from the standard configuration and aligned with the theoretical expectation for the entire range of measurement frequencies below a few megahertz. In addition, this study demonstrated the qualitative behavior of the frequency-dependent capacitance with the channel conduction of carriers using an analytical model.