压阻效应 70 周年机械传感器教程

F. Reverter
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摘要

1954 年,即整整七十年前,发生并宣布了一件与了解机械传感器物理学相关的重大事件。这一事件就是压阻效应的发现,它促使人们开发出灵敏度远高于传统金属应变片的半导体应变片。这反过来又推动了最早的微机械硅器件和相应的 MEMS 器件的开发。在过去几十年中,传感器相关的科学和技术取得了显著进步,但压阻效应仍然是许多机械传感器背后的主要物理现象,无论是商业还是研究模型。值此 70 周年之际,本教程旨在解释应变计、电容式传感器和压电式传感器这三种主要机械传感器的工作原理、子类型、输入-输出特性和局限性。此外,还对这三种传感器技术进行了比较,强调了每种技术的主要优缺点。
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A Tutorial on Mechanical Sensors in the 70th Anniversary of the Piezoresistive Effect
An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input–output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one.
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