使用高介电质增强开关能力的 InGaAs-SOI-FinFET 性能评估

Priyanka Agrwal, Ajay Kumar
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摘要

本文介绍了一种高k In0.53Ga0.47As 硅绝缘体 FinFET(InGaAs-SOI-FinFET),用于 7 nm 栅极长度的高开关和超低功耗应用。砷化镓铟(InGaAs)是一种化合物半导体,在包括 FinFET 在内的半导体器件领域备受关注。在拟议的 FinFET 中加入 InGaAs 具有多项优势,使其成为某些应用中极具吸引力的材料。对 InGaAs-SOI-FinFET 的性能进行了观察,发现其电子迁移率高,导通电流(ION)、漏极电流(IDS)、跨电导(gm)、能带、阈下摆动(SS)、电场、表面电位均有所改善,而且短沟道性能更好。InGaAs-SOI-FinFET 的所有结果都同时与 SOI-FinFET 和传统 FinFET(C-FinFET)进行了比较。与其他两种器件相比,在沟道中加入 InGaAs 和高 K 栅极材料可分别提高漏极电流⁓75% 和 ⁓77%。由于 InGaAs-SOI-FinFET 的漏极电流更大,其他参数也得到了改善,从而实现了更高性能的应用。
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Performance assessment of InGaAs–SOI–FinFET for enhancing switching capability using high-k dielectric

In this work, a high-k In0.53Ga0.47As silicon-on-insulator FinFET (InGaAs–SOI–FinFET) is presented for high-switching and ultra-low power applications at 7 nm gate length. Indium Gallium Arsenide (InGaAs) is a compound semiconductor that has gained attention in the field of semiconductor devices, including FinFETs. The incorporation of InGaAs in proposed FinFETs introduces several advantages, making it an attractive material for certain applications. InGaAs–SOI–FinFET performance has been observed and found high electron mobility, improved On-Current performance (ION), drain current (IDS), transconductance (gm), energy bands, lower subthreshold swing (SS), electric field, surface potential, and better short-channel behaviour. All the results of InGaAs–SOI–FinFET have been simultaneously compared with SOI-FinFET and conventional FinFET (C-FinFET). Incorporating InGaAs in the channel with high-k gate material enhances the drain current by ⁓75% and ⁓77% in the proposed device compared to the other two counterparts. Owing to the higher drain current in the InGaAs–SOI–FinFET, other parameters have also been improved, which leads to higher performance applications.

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