The synergistic design of 5 V ESD protection applications using two holding voltage improving methods

In this paper, a series of Low Voltage Triggering Silicon-Controlled Rectifier (LVTSCR)-based devices were designed and fabricated in a 0.25 μm Bipolar-CMOS-DMOS (BCD) process. Two distinct methods, the integration of additional doping regions and current paths, are investigated to improve the proposed devices’ holding voltage (V_h). Two-dimensional device simulation is employed to elucidate the working mechanism of these ESD protection devices, complemented by the introduction of a transmission line pulse (TLP) measuring system to assess their ESD protection capabilities. Comparative analysis of TLP results reveals that both methods contribute significantly to the augmentation of holding voltage in LVTSCR ESD protection devices. The refined structure, LVTSCR_BN, with two additional current paths, surface and buried, demonstrated a noticeable increment in holding voltage. With its holding voltage of 7.619 V and trigger voltage of 10.61 V, LVTSCR_BN is proved suitable for the ESD protection of circuits operating at the voltage of 5 V.